Abstract: The present disclosure for wafer bonding, including forming an epitaxial layer on a top surface of a first wafer, forming a sacrificial layer over the epitaxial layer, trimming an edge of the first wafer, removing the sacrificial layer, forming an oxide layer over the top surface of the first wafer subsequent to removing the sacrificial layer, and bonding the top surface of the first wafer to a second wafer.

Abstract: A flow guiding device in an immersion-cooled chassis of a server comprises at least one deflector located above a chip on a mainboard in the chassis, each deflector comprises a first end for mounting to the mainboard above the chip and a second end inclined away from the mainboard. The first end is immersed in coolant, the second end is higher than the first end; the deflector further comprises a hollow part including multiple through holes for interrupting upward movement vapor bubbles generated by the hot chip, which reduces probability of the vapor bubbles escaping from the coolant liquid and the chassis. A liquid-cooled chassis having the flow guiding device is also disclosed.

Abstract: A method for wireless communication by a UE includes receiving, from a base station, DCI indicating both a semi-persistent schedule for PDSCH occasions within a transmission window and a first quantity of a first group of empty PDSCH occasions. The PDSCH occasions may include the first group of empty PDSCH occasions and a second group of non-empty PDSCH occasions. The method also includes receiving, from the base station, downlink data transmissions within the transmission window based on the semi-persistent schedule. The method further includes transmitting, to the base station, a feedback message indicating a second quantity of either a first group of NACKs associated with the first group of empty PDSCH occasions or a second group of NACKs associated with the second group of non-empty PDSCH occasions based on a total quantity of both the first group of NACKs and the second group of NACKs being greater than the first quantity.

Abstract: A purification device for exercise environment is provided and includes a main body, a purification unit, a gas guider and a gas detection module. The purification unit, the gas guider and the gas detection module are disposed in the main body to guide the gas outside the main body through the purification unit for filtering and purifying the gas, and discharge a purified gas. The gas detection module detects particle concentration of suspended particles contained in the purified gas. The gas guider is controlled to operate and export the gas at an airflow rate within 3 minutes. The particle concentration of the suspended particles contained in the purified gas, which is filtered by the purification unit, is reduced to and less than 0.75 ?g/m3. Consequently, the purified gas is filtered, and an exerciser in an exercise environment can breathe with safety.

Abstract: Methods, systems, and devices for wireless communications are described. A first device may obtain information indicative of a configuration to provide code block group (CBG)-based feedback for one or more semi-persistent scheduling (SPS) communications scheduled for the first device. The first device may then monitor for the one or more SPS communications in one or more CBGs of a TB in accordance with one or more SPS communication configurations. Based on the monitoring of the semi-persistent scheduling communications, the first device may generate one or more feedback bits associated with the one or more SPS communications, and may communicate, with a second device, the one or more feedback bits associated with the one or more SPS communications in accordance with the configuration to provide CBG-based feedback.

Abstract: A method of fabricating a contact structure includes the following steps. An opening is formed in a dielectric layer. A conductive material layer is formed within the opening and on the dielectric layer, wherein the conductive material layer includes a bottom section having a first thickness and a top section having a second thickness, the second thickness is greater than the first thickness. A first treatment is performed on the conductive material layer to form a first oxide layer on the bottom section and on the top section of the conductive material layer. A second treatment is performed to remove at least portions of the first oxide layer and at least portions of the conductive material layer, wherein after performing the second treatment, the bottom section and the top section of the conductive material layer have substantially equal thickness.

Abstract: An optical imaging system (1) is configured for photographing a sample and includes a lighting module (11) and an imaging module (15). The lighting module (11) is configured for outputting excitation light, the excitation light is configured to excite the sample to generate excited light, the imaging module (15) comprises a time delay integration line scan camera (151), the time delay integration line scan camera (151) is configured to record the excited light. A biochemical substance detection system using the optical imaging system (1) is also provided, improving the detection flux.

Abstract: A method includes: generating a designed mask overlay mark associated with an actual mask overlay mark to be formed in a mask; forming the actual mask overlay mark in the mask based on the designed mask overlay mark, the actual mask overlay mark including a plurality of overlay patterns; forming a device feature pattern adjacent to the actual mask overlay mark; forming an alignment of the mask by a mask metrology apparatus including a light source having a wavelength and a numerical aperture, wherein a pitch between adjacent two of the plurality of overlay patterns does not exceed the wavelength divided by twice the numerical aperture; and forming a pattern in a layer of a wafer by transferring the device feature pattern while the mask is under the alignment.

Abstract: The present disclosure provides a detecting apparatus, system, and method, and belongs to the technical field of detection. The detecting apparatus includes a beam splitting device, a first dichroic mirror, an objective lens, a fluorescence guiding device, and an imaging system including a plurality of imaging devices.

Abstract: An apparatus and method for testing gallium nitride field effect transistors (GaN FETs) are disclosed herein. In some embodiments, the apparatus includes: a high side GaN FET, a low side GaN FET, a high side driver coupled to a gate of the high side GaN FET, a low side driver coupled to a gate of the low side GaN FET, and a driver circuit coupled to the high side and low side drivers and configured to generate drive signals capable of driving the high and low side GaN FETs, wherein the high and low side GaN FETs and transistors, within the high and low side drivers and the driver circuit, are patterned on a same semiconductor device layer during a front-end-of-line (FEOL) process.

Abstract: A method for preparing (2S,3R)-p-methylsulfonylphenylserine is provided. In order to solve the existing problem of low conversion rate, provided is a method for preparing (2S,3R)-p-methylsulfonylphenylserine, including carrying out a reaction between p-methylsulfonylbenzaldehyde, L-threonine and pyridoxal phosphate in an oxygen-containing environment under the combined action of transaldolase and acetaldehyde oxidase to obtain a product (2S,3R)-p-methylsulfonylphenylserine. The method can effectively achieve the effect of improving the conversion rate of the reaction and has the advantage of high product yield.

Abstract: A touchpad assembly comprises a cover plate, a touch circuit board, a carrying mechanism, a magnet group, and vibration isolators. The touch circuit board is disposed under the cover plate and comprises a first touch electrode layer, a second touch electrode layer, and a single-layer embedded coil layer. The carrying mechanism has a central accommodating portion. The magnet group is disposed in the central accommodating portion and constitutes a vibration module with the single-layer embedded coil layer. A pressing gap is formed between the touch circuit board and the magnet group. The vibration isolators are disposed between the touch circuit board and the carrying mechanism.

Abstract: An illuminated touchpad includes a panel, a light guide layer and a circuit board. The panel includes a first light transmitting region and a second light transmitting region. The light guide layer includes a first light guide region and a second light guide region. The circuit board includes a controller, a touch module, a first light source and a second light source. The controller controls the first light source to emit light, such that the first light guide region guides the light emitted by the first light source to the first light transmitting region. When the touch module senses that the first light transmitting region is touched, the controller controls the second light source to emit light, such that the second light guide region guides the light emitted by the second light source to the second light transmitting region.

Abstract: The invention provides an etching method of a semiconductor structure, which comprises providing a substrate with a gate structure, an oxide layer and a first nitride layer beside the gate structure, and performing an etching step to remove the first nitride layer and keep the oxide layer, wherein in the etching step, the etching selectivity ratio of the etched nitride material to the etched oxide material is greater than 300.

Abstract: A method includes forming a conductive layer over a first dielectric layer; etching a recess in the conductive layer, wherein the recess exposes a top surface of the first dielectric layer; selectively depositing a capping layer on exposed sidewalls of the conductive layer within the recess; depositing a liner on the capping layer; forming a sacrificial material in the recess; and forming a second dielectric layer on the sacrificial material and on sidewalls of the recess; and after forming the second dielectric layer, performing a thermal process to remove the sacrificial material.

Abstract: Embodiments of the present invention provide a multiple-variable predictive maintenance method for a component of a production tool and a computer program product thereof, in which a multiple-variable time series prediction (TSPMVA) and an information criterion algorithm are adapted to build a best vector autoregression model (VAR), thereby forecasting the complicated future trend of accidental shutdown of the component of the production tool. Therefore, the multiple-variable prediction of the present invention can improve the accuracy of prediction compared with the single-variable prediction.

Abstract: A rail mounting assembly for supporting a pair of electrical components on a case of a server is disclosed. The assembly includes a first mounting structure for receiving a first electrical component; a second mounting structure for receiving a second electrical component; and a single rail fixed between the first mounting structure and the second mounting structure, the single rail having an I-shaped cross-section. The single rail includes a first groove configured to engage with the first electrical component when the first electrical component is mounted to the first mounting structure, and a second groove configured to engage with the second electrical component when the second electrical component is mounted to the second mounting structure. A distance between the first electrical component engaged with the first groove and the second electrical component engaged with the second groove is less than 5 mm, preferably equal to or less than 4 mm.

Abstract: Certain aspects of the present disclosure provide techniques for wireless communication. The techniques include a method wireless communication by a user equipment including receiving a first physical downlink control channel (PDCCH) from a first transmission reception point (TRP) and a second PDCCH from a second TRP, wherein the first PDCCH and the second PDCCH include the same downlink control information (DCI), selecting a physical uplink control channel (PUCCH) resource for transmitting hybrid automatic repeated request acknowledgment (HARQ-ACK) feedback based on one of the first PDCCH or the second PDCCH, and transmitting a PUCCH that includes the HARQ-ACK feedback using the selected PUCCH resource.

Abstract: Various aspects of the present disclosure generally relate to wireless communication. In some aspects, a user equipment (UE) may receive an indication of a plurality of sets of contiguous time domain resources corresponding to a plurality of segments of a multi-slot transmission occasion. The UE may identify an interruption of a multi-slot communication associated with an impacted segment of the plurality of segments. The UE may transmit at least one communication on the multi-slot transmission occasion based on at least one of: prioritization on the impacted segment, a bandwidth part switch associated with the interruption, one or more segments, of the plurality of segments, that occur after the impacted segment, or a remainder of the impacted segment. Numerous other aspects are provided.