Abstract: This invention provides a method and a system for cleaning a container for storing wafers or masks. A contained with lid is washed directly after the container is loaded with lid opened in the cleaning system. Gas exchange rate in the washing station can be increased such that particles or AMC inside the container or attached to the lid can be carried out more easily. Then, contamination-free gas is purged to the container as well as lid in a high temperature environment. A vacuum station can be optionally adapted between the washing station and the contamination-free gas purging station to enhance the cleanliness of the container.

Abstract: A touch key control and icon display apparatus includes a first substrate, a light-emitting element, a second substrate, and a body portion. The light-emitting element is disposed adjacent to the first substrate. The second substrate includes a circuit layer configured to sense a touch. The body portion is disposed between the first and second substrates and includes a reflective surface that defines a chamber. The chamber is formed through the body portion and configured to receive the light-emitting element. The circuit layer includes an icon disposed adjacent to an opening of the chamber. A portion of light, from the light-emitting element, incident on the circuit layer can pass through the circuit layer, and another portion of the light can be reflected by the circuit layer.

Abstract: A touch key control and icon display apparatus comprises a first substrate, a light-emitting element, a second substrate, and a body portion. The light-emitting element is disposed adjacent to the first substrate. The second substrate comprises a circuit layer configured to sense a touch. The body portion is disposed between the first and second substrates and comprises a reflective surface that defines a chamber. The chamber is formed through the body portion and configured to receive the light-emitting element. The circuit layer comprises an icon disposed adjacent to an opening of the chamber. A portion of light, from the light-emitting element, incident on the circuit layer can pass through the circuit layer, and another portion of the light can be reflected by the circuit layer.