Abstract: A method includes loading a wafer over a wafer chuck in a process chamber; performing a deposition process on the loaded wafer; supplying a fluid medium to a fluid guiding structure in the wafer chuck from a fluid inlet port on the wafer chuck, the fluid guiding structure comprising a plurality of arc-shaped channels fluidly communicated with each other; guiding the fluid medium from a first one of the arc-shaped channels of the fluid guiding structure to a second one of the arc-shaped channels of the fluid guiding structure. The second one of the arc-shaped channels of the fluid guiding structure is concentric with the first one of the arc-shaped channels of the fluid guiding structure from a top view.

Abstract: A method includes following steps. A first transistor is formed on a substrate. A first dielectric layer is formed over the first transistor. A first trench is formed in the first dielectric layer. An amorphous semiconductor layer is deposited in the first trench and over the first dielectric layer. The amorphous semiconductor layer is crystallized into a crystalline semiconductor layer. A second transistor is formed over the crystalline semiconductor layer.

Abstract: An optical element driving system is provided. The optical element driving system includes an optical element driving mechanism and a control assembly. The optical element driving mechanism includes a movable portion, a fixed portion, and a driving assembly. The movable portion is used for connecting to an optical element. The movable portion is movable relative to the fixed portion. The movable portion is in an accommodating space in the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The control assembly provides a driving signal to the driving assembly to control the driving assembly. The driving assembly includes a first driving element, and the material of the first driving element includes shape memory alloy.

Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a first device and a second device disposed adjacent to the first device; a conductive pillar disposed adjacent to the first device or the second device; a molding surrounding the first device, the second device and the conductive pillar; and a redistribution layer (RDL) over the first device, the second device, the molding and the conductive pillar, wherein the RDL electrically connects the first device to the second device and includes an opening penetrating the RDL and exposing a sensing area over the first device.

Abstract: Various solutions for network power saving with respect to user equipment and network apparatus in mobile communications are described. An apparatus may receive a power saving indication. The apparatus may obtain power saving information according to the power saving indication. The power saving indication may comprise at least one of a discontinuous reception (DRX) switch indicator for switching between a user equipment (UE)-specific-DRX (U-DRX) and a group-specific-DRX (G-DRX), an energy saving mode (EMS) indication, a list of synchronization signal block (SSB) or channel state information-reference signal (CSI-RS) resources, and a set of transmission configuration indication (TCI)I states or RS resource indexes.

Abstract: A driving mechanism is provided. The driving mechanism includes a movable portion, a fixed portion, a driving assembly, and an aperture module. The movable portion is used for holding an optical module. The optical module includes a substrate and an optical sensor, the optical module connects to an external circuit through the substrate, and the optical sensor is used for receiving a light. The movable portion is movable relative to the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The aperture module is used for controlling size of an aperture, and the light enters to the optical sensor through the aperture.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: An optical module includes a first side and a second side, and includes a movable portion, a fixed portion, a driving portion, a position-sensing portion, and a circuit board. The movable portion includes a holder for holding an optical element with an optical axis. The fixed portion includes a base and a circuit component, wherein the circuit component has an external electrical connection portion, and the movable portion is movably connected to the fixed portion. The driving portion is configured to drive the movable portion to move relative to the fixed portion. The position-sensing portion includes a position-sensing element, and the position-sensing element is configured to sense the position of the movable portion relative to the fixed portion.

Abstract: An optical element driving system is provided. The optical element driving system includes an optical element driving mechanism and a control assembly. The optical element driving mechanism includes a movable portion, a fixed portion, and a driving assembly. The movable portion is used for connecting to an optical element. The movable portion is movable relative to the fixed portion. The movable portion is in an accommodating space in the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The control assembly provides a driving signal to the driving assembly to control the driving assembly. The driving assembly includes a first driving element, and the material of the first driving element includes shape memory alloy.

Abstract: An optical element driving system is provided. The optical element driving system includes an optical element driving mechanism and a control assembly. The optical element driving mechanism includes a movable portion, a fixed portion, a driving assembly, and a position-sensing assembly. The movable portion is used for connecting to an optical element. The movable portion is movable relative to the fixed portion. The movable portion is in an accommodating space in the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The control assembly provides a driving signal to the driving assembly to control the driving assembly. The position-sensing assembly is used for detecting the movement of the movable portion relation to the fixed portion and providing a motion-sensing signal to the control assembly.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: An optical member driving mechanism for driving an optical member having an optical axis is provided, including a fixed portion, a movable portion, a first elastic member, and a driving assembly. The movable portion is configured to hold the optical member, and is movably connected the fixed portion via the first elastic member. The driving assembly drives the movable portion to move along the optical axis within a range of motion. The range of motion includes a first limit moving range and a second limit moving range. The first limit moving range is the maximum distance that the movable portion can move toward the light-entering side, and the second limit moving range is the maximum distance that the movable portion can move toward the light-emitting side. When the movable portion is in a predetermined position, the first limit moving range is greater than the second limit moving range.

Abstract: An optical system is provided, including a fixed assembly, a plurality of movable members, and a plurality of driving assemblies respectively connected to the movable members. The movable members are connected to an optical element and movable relative to the fixed assembly. The driving assemblies respectively drive the movable members to move relative to the fixed assembly in different time intervals.

Abstract: An optical module is provided, including a movable portion, a fixed portion and a driving assembly. The movable portion is used to hold an optical element having an optical axis. The movable portion is movably connected to the fixed portion. The driving assembly disposed in the fixed portion to drive the movable portion to move along the optical axis relative to the fixed portion. The driving assembly includes a first magnetic element and a second magnetic element. The first magnetic element and the second magnetic element are aligned along the optical axis. The size of the first magnetic element and the size of the second magnetic element along the optical axis are different.

Abstract: A driving system for moving several optical elements is provided, including a first module and a second module arranged in a first direction. The first module has a first terminal on a first side thereof to electrically connect to an external circuit. The second module has a second terminal on a second side thereof to electrically connect to the external circuit. The first and second sides are adjacent to each other and parallel to the first direction.

Abstract: An optical system is provided and includes a reflecting unit, a lens unit, an image sensor, and a control module. The image sensor is configured to receive light, and the light is configured to enter the optical system and pass through the reflecting unit and the lens unit to the image sensor. The control module is configured to control a first driving module of the reflecting unit and/or a lens driving mechanism of the lens unit according to reference information to drive the light to move in a first direction and/or a second direction on the image sensor, so as to compensate for the offset displacement of the light on the image sensor when the optical system is shaken.

Abstract: A calibration method of an optical system is provided, wherein the optical system includes a movable element that can move within an operation interval. The calibration method includes the step of establishing a relationship between the operation interval and an electrical signal coding sequence. The calibration method further includes the step of establishing a relationship between the operation interval and a sensing signal coding sequence.