Abstract: Methods of forming dielectric layers on a copper substrate are disclosed herein. In one embodiment, a method of depositing a dielectric layer can include positioning a copper substrate in a process chamber, forming and delivering the cleaning plasma to the substrate to form a cleaned surface on the substrate, forming and delivering the adhesion plasma to the surface of the substrate to form a copper compound thereon and depositing a dielectric layer over the copper compound. In another embodiment, a method of depositing a dielectric layer can include positioning a copper substrate in a process chamber, delivering an adhesion plasma to the copper substrate to form a copper compound and flowing a deposition gas into the process chamber to deposit a dielectric layer over the copper compound, wherein the flow between the adhesion plasma and the deposition gas is continuous.

Abstract: Provided are methods of preparing a lithium ion cell including forming the cell by charging the lithium ion cell to at least about 5% or, more specifically, to at least about 20% of the theoretical capacity of the negative electrode electrochemically active material, holding the lithium ion cell in a charged state for at least about 0.5 hours, and discharging the lithium ion cell. Holding the lithium ion cell in a partially charged state is believed to significantly improve its Coulombic efficiency during subsequent cycling.

Abstract: This disclosure provide a nanopillar electrode device, comprising a substrate patterned with a plurality of metal pads. The device may further comprise a plurality of nanopillars electrode arrays, wherein each nanopillar electrode array is attached to the substrate above a metal pad and electrically connected to the pad. The device may further comprise and a chamber surrounding the nanopillar electrodes, which can be used for culturing cells of interest for recording action potentials. The nanopillar electrode device may be configured to apply a voltage through the nanopillar electrodes from a voltage source. Nanopillar electroporation may be used to increase the permeability of cell membranes to allow intracellular recording. Also provided are methods of device fabrication, and methods of use.

Abstract: Methods, systems and devices are implemented in connection with rechargeable batteries. One such device includes a cathode that has lithiated sulfur. The device also includes a porous structure having pores containing the lithium-sulfide particles introduced during a manufacturing stage thereof.

Abstract: The present invention generally relates to a heated backing plate coupled to a gas distribution showerhead in a PECVD chamber. The backing plate is heated by circulating a heating fluid either through channels formed within the backing plate or a tube coupled to the backing plate. A heated backing plate heats up the gas distribution showerhead, which improves the cleaning rate of the PECVD chamber that performs low temperature processes.

Abstract: Aspects of the present disclosure are directed to apparatuses and methods involving nanowires having junctions therebetween. As consistent with one or more embodiments, an apparatus includes first and second sets of nanowires, in which the second set overlaps the first set. The apparatus further includes a plurality of nanowire joining recrystallization junctions, each junction including material from a nanowire of the first set that is recrystallized into an overlapping nanowire of the second set.

Abstract: Aspects of the present disclosure are directed towards energy storage devices, and methods of manufacturing such devices. Energy storage devices, consistent with the present disclosure, include a source of lithium ions, a plurality of nanoparticles, and a conductive polymer network. The nanoparticles are encapsulated in conductive polymer shells and volumetrically change due to lithiation and delithiation due to movement of the lithium ions created by an electrical potential. The conductive polymer network bonds to the nanoparticles and accommodates volumetric changes of the plurality of nanoparticles during lithiation and delithiation.

Abstract: A method for producing and depositing air-stable, easily decomposable, vulcanized ink on any of a wide range of substrates is disclosed. The ink enables high-volume production of optoelectronic and/or electronic devices using scalable production methods, such as roll-to-roll transfer, fast rolling processes, and the like.

Abstract: The present invention provides methods and apparatus for a gas diffusion assembly in a deposition processing chamber. The invention includes a backing plate having an inlet for providing a process gas to a process chamber, a diffusion plate including a plurality of apertures for allowing the process gas to flow into the process chamber, a blocking plate disposed between the backing plate and the diffusion plate and including a plurality of apertures, and at least one gas flow guide disposed between the blocking plate and the backing plate and adapted to direct process gas flow laterally. Numerous additional features are disclosed.

Abstract: Provided are conductive substrates having open structures and fractional void volumes of at least about 25% or, more specifically, or at least about 50% for use in lithium ion batteries. Nanostructured active materials are deposited over such substrates to form battery electrodes. The fractional void volume may help to accommodate swelling of some active materials during cycling. In certain embodiments, overall outer dimensions of the electrode remain substantially the same during cycling, while internal open spaces of the conductive substrate provide space for any volumetric changes in the nanostructured active materials. In specific embodiments, a nanoscale layer of silicon is deposited over a metallic mesh to form a negative electrode. In another embodiment, a conductive substrate is a perforated sheet with multiple openings, such that a nanostructured active material is deposited into the openings but not on the external surfaces of the sheet.

Abstract: Provided are electrode layers for use in rechargeable batteries, such as lithium ion batteries, and related fabrication techniques. These electrode layers have interconnected hollow nanostructures that contain high capacity electrochemically active materials, such as silicon, tin, and germanium. In certain embodiments, a fabrication technique involves forming a nanoscale coating around multiple template structures and at least partially removing and/or shrinking these structures to form hollow cavities. These cavities provide space for the active materials of the nanostructures to swell into during battery cycling. This design helps to reduce the risk of pulverization and to maintain electrical contacts among the nanostructures. It also provides a very high surface area available ionic communication with the electrolyte. The nanostructures have nanoscale shells but may be substantially larger in other dimensions.

Abstract: An oxidative peak in a cathodic scan is observed in the cyclic voltammetry of glucose at gold electrodes, its peak current density being proportional to glucose concentration in a wide potential range. The application of this phenomenon in blood glucose sensing has been hindered by the presence of inhibitors: the most problematic are chlorides due to their high concentration and difficult separation from glucose. The present invention provides a solution to this problem involving a three electrode, four step pulsed electrochemical detection technique.

Abstract: Provided are electrode layers for use in rechargeable batteries, such as lithium ion batteries, and related fabrication techniques. These electrode layers have interconnected hollow nanostructures that contain high capacity electrochemically active materials, such as silicon, tin, and germanium. In certain embodiments, a fabrication technique involves forming a nanoscale coating around multiple template structures and at least partially removing and/or shrinking these structures to form hollow cavities. These cavities provide space for the active materials of the nanostructures to swell into during battery cycling. This design helps to reduce the risk of pulverization and to maintain electrical contacts among the nanostructures. It also provides a very high surface area available ionic communication with the electrolyte. The nanostructures have nanoscale shells but may be substantially larger in other dimensions.

Abstract: Embodiments of the disclosure generally provide methods of forming a silicon containing layers in TFT devices. The silicon can be used to form the active channel in a LTPS TFT or be utilized as an element in a gate dielectric layer, a passivation layer or even an etch stop layer. The silicon containing layer is deposited by a vapor deposition process whereby an inert gas, such as argon, is introduced along with the silicon precursor. The inert gas functions to drive out weak, dangling silicon-hydrogen bonds or silicon-silicon bonds so that strong silicon-silicon or silicon-oxygen bonds remain to form a substantially hydrogen free silicon containing layer.

Abstract: Electrical devices comprised of nanowires are described, along with methods of their manufacture and use. The nanowires can be nanotubes and nanowires. The surface of the nanowires may be selectively functionalized Nanodetector devices are described.

Abstract: A battery includes an anode, a cathode, and an electrolyte disposed between the anode and the cathode. The cathode includes a hollow structure defining an internal volume and a sulfur-based material disposed within the internal volume. A characteristic dimension of the internal volume is at least 20 nm, and the sulfur-based material occupies less than 100% of the internal volume to define a void.

Abstract: A nano-patterned membrane electrode assembly (MEA) is provided, which includes an electrolyte membrane layer having a three-dimensional close-packed array of hexagonal-pyramids, a first porous electrode layer, disposed on a top surface of the electrolyte membrane layer that conforms to a top surface-shape of the three-dimensional close-packed array of hexagonal-pyramids, and a second porous electrode layer disposed on a bottom surface of said electrolyte membrane layer that conforms to a bottom surface-shape of the three-dimensional close-packed array of hexagonal-pyramids, where a freestanding nano-patterned MEA is provided.

Abstract: An electrochemical energy storage device includes a cathode, an anode, and an electrolyte disposed between the cathode and the anode. The anode includes a capacitive material as a majority component, and further includes an electrochemically active material as a minority component, such that an operating potential of the anode is configured according to a reaction potential of the electrochemically active material.

Abstract: A DRM scheme that may be optionally invoked by the owner. With the DRM protection turned on, the media is encrypted before it is distributed in a P2P network, and is decrypted prior to its use (play back). The peers may still efficiently distribute and serve without authorization from the owner. Nevertheless, when the media is used (played back), the client node must seek proper authorization from the owner. The invention further provides a hierarchical DRM scheme wherein each packet of the media is associated with a different protection level. In the hierarchical DRM scheme of the invention there is usually an order of the protection level. As a result, in one embodiment of the invention, the decryption key of a lower protection layer is the hash of the decryption key at the higher protection level. That way, a user granted access to the high protection layer may simply hold a single license of that layer, and obtain decryption keys of that layer and below.

Abstract: A transparent electrochemical energy storage device includes a pair of electrodes and an electrolyte disposed between the electrodes. Each of the electrodes includes a substrate and a set of electrode materials that are arranged across the substrate in a pattern with a feature dimension no greater than 200 ?m and occupying an areal fraction in the range of 5% to 70%.