Abstract: A sidewall assembly of a substrate processing chamber has a composite structure comprising an inner layer comprised of a first material and an inward, chamber facing surface, an outer layer that is comprised of a second material and encloses the inner layer, and a middle layer disposed around the inner layer between the inner layer and the outer layer that thermally insulates the outer layer from the inner layer.

Abstract: A virtual machine (VM) operating system (OS) device assignment system includes a processor, wherein the processor is configured to execute a host VM, a hypervisor, a device assigner, and a guest VM. The host VM is arranged to generate a driving signal for driving a booting of the guest VM. The hypervisor is arranged to generate a first trigger signal according to the driving signal, for triggering assignment of at least one device. The device assigner is arranged to modify a descriptor to generate a modified descriptor for assigning the at least one device among a plurality of devices to the guest VM, and install the modified descriptor into a protected memory, wherein an OS of the guest VM is configured according to the modified descriptor.

Abstract: A cybersecurity system includes sensors that detect and report computer security events. Collected reports of computer security events are formed into state sequences, which are used as training data to train and build a prediction model. A current computer security event is detected and used as an input to the prediction model, which provides a prediction of a next computer security event. A monitoring level of a cybersecurity sensor is adjusted in accordance with the predicted next computer security event.