Abstract: The present disclosure describes a method that includes forming a fin protruding from a substrate, the fin including a first sidewall and a second sidewall formed opposite to the first sidewall. The method also includes depositing a shallow-trench isolation (STI) material on the substrate. Depositing the STI material includes depositing a first portion of the STI material in contact with the first sidewall and depositing a second portion of the STI material in contact with the second sidewall. The method also includes performing a first etching process on the STI material to etch the first portion of the STI material at a first etching rate and the second portion of the STI material at a second etching rate greater than the first etching rate. The method also includes performing a second etching process on the STI material to etch the first portion of the STI material at a third etching rate and the second portion of the STI material at a fourth etching rate less than the third etching rate.

Abstract: A device includes a semiconductor nanostructure, and an oxide layer, which includes horizontal portions on a top surface and a bottom surface of the semiconductor nanostructure, vertical portions on sidewalls of the semiconductor nanostructure, and corner portions on corners of the semiconductor nanostructure. The horizontal portions have a first thickness. The vertical portions have a second thickness. The corner portions have a third thickness. Both of the second thickness and the third thickness are greater than the first thickness. A high-k dielectric layer surrounds the oxide layer. A gate electrode surrounds the high-k dielectric layer.

Abstract: A method for monitoring and early warning of structural collapse, having following steps of: installing at least one electric field sensor in a monitoring area, wherein the at least one electric field sensor is used for measuring an electric field signal of the monitoring area; receiving the electric field signal and applying a signal analysis to the electric field signal; and issuing a warning signal when a critical transition feature occurs in the electric field signal to which the signal analysis is applied.

Abstract: A method for monitoring and early warning of structural collapse, comprising following steps of: installing at least one electric field sensor in a monitoring area, wherein the at least one electric field sensor is used for measuring an electric field signal of the monitoring area; receiving the electric field signal and applying a signal analysis to the electric field signal; and issuing a warning signal when a critical transition feature occurs in the electric field signal to which the signal analysis is applied.