Abstract: A liquid-metal organic compound supply system which is applicable to a MOVCD processing apparatus is provided, including a first bottle body accommodating a high purity liquid-metal organic compound, a first outlet pipe of the first bottle body connects to the MOVCD processing apparatus; a second bottle body accommodating a high purity liquid-metal organic compound, a connecting pipe connecting between a first inlet pipe of the first bottle body and a second outlet pipe of the second bottle body; and a liquid level detecting module comprising a liquid level gauge detecting liquid level of the first bottle body and a display unit displaying liquid level of the first bottle body, and the liquid level gauge being disposed in the first bottle body, the display unit being electrically connected to the liquid level gauge. Besides, the system also decreases the manufacturing and packing costs of trimethyl gallium.

Abstract: Disclosed is a liquid-metal organic compound supply system which is applicable to a metal organic chemical vapor deposition (MOVCD) processing apparatus, including disposing a first bottle body in a thermostat, a second bottle body and a three-way valve in room temperature. Wherein a first connecting end of the three-way valve and a first outlet pipe of the first bottle body connect to the MOVCD processing apparatus, a second connecting end connects to a second inlet pipe of the second bottle body and a third connecting end connects to a first inlet pipe of the first bottle body and a second outlet pipe of the second bottle body. When the present invention is applied to the MOCVD manufacturing process, it prolongs usage period of trimethyl gallium, decreases replacement frequency and increases utilization ratio. Besides, the present invention also decreases the manufacturing and packing costs of trimethyl gallium.