Abstract: A multi-use carrier is provided for being configured to selectively carry one of a first wafer cassette and a second wafer cassette that is different from the first wafer cassette. The multi-use carrier includes a carrying board, at least two gas-inlet channels arranged on one side of the carrying board, and at least four gas-outlet channels arranged on the opposite side of the carrying board. The at least two gas-inlet channels are selectively cooperated with two of the at least four gas-outlet channels so as to be jointly configured to spatially communicate with an interior space of the first wafer cassette. The at least two gas-inlet channels are selectively cooperated with the other two of the at least four gas-outlet channels so as to be jointly configured to spatially communicate with an interior space of the second wafer cassette.

Abstract: A gas-inlet module and a gas-inlet nozzle are provided. The gas-inlet has a first gas-inlet channel and a second gas-inlet channel. The first gas-inlet channel has a first end opening, the second gas-inlet channel has a second end opening, and a distance between a center point of the first end opening and a center point of the second end opening is defined as an offset distance. A value defined by an inner radius of the first end opening or an inner radius of the second end opening divided by the offset distance is within a range from 1/7 to 5/7.

Abstract: A load port and a multi-use carrier are provided. The load port includes a carrying board, two gas-inlet nozzles disposed on the carrying board, and two gas-outlet nozzles disposed on the carrying board. Each of the two gas-inlet nozzles has a shared gas-inlet channel. Each of the two gas-outlet nozzles has a first gas-outlet channel and a second gas-outlet channel that is spaced apart from the first gas-outlet channel. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the first gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a first wafer cassette. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the second gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a second wafer cassette.

Abstract: A load port and a multi-use carrier are provided. The load port includes a carrying board, two gas-inlet nozzles disposed on the carrying board, and two gas-outlet nozzles disposed on the carrying board. Each of the two gas-inlet nozzles has a shared gas-inlet channel. Each of the two gas-outlet nozzles has a first gas-outlet channel and a second gas-outlet channel that is spaced apart from the first gas-outlet channel. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the first gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a first wafer cassette. The shared gas-inlet channels of the two gas-inlet nozzles are selectively cooperated with the second gas-outlet channels of the two gas-outlet nozzles so as to be jointly configured to spatially communicate with a second wafer cassette.

Abstract: A gas-inlet module and a gas-inlet nozzle are provided. The gas-inlet has a first gas-inlet channel and a second gas-inlet channel. The first gas-inlet channel has a first end opening, the second gas-inlet channel has a second end opening, and a distance between a center point of the first end opening and a center point of the second end opening is defined as an offset distance. A value defined by an inner radius of the first end opening or an inner radius of the second end opening divided by the offset distance is within a range from 1/7 to 5/7.

Abstract: A nozzle is provided and includes a carrying segment, an assembling segment, a conical frustum segment, and at least one ring-shaped rib formed on the carrying segment and surrounding the conical frustum segment. The carrying segment has a top side and an opposite bottom side. The assembling segment is formed by extending from the bottom side of the carrying segment. The conical frustum segment is formed to taper from the top side of the carrying segment in a direction away from the assembling segment. The conical frustum segment defines a central axis, and a surrounding lateral surface of the conical frustum segment and a plane perpendicular to the central axis have an angle therebetween that is within a range from 35 degrees to 70 degrees. The conical frustum segment, the carrying segment, and the assembling segment jointly define an airflow channel penetrating therethrough along the central axis.