Abstract: The present invention relates to a novel composition that may be used to control the etching rate of TIN with respect to W, and remove any residues from the surface, e.g. organic or inorganic residues that could contain fluorine (F), which composition comprises a) an aliphatic or aromatic sulfonic acid; b) one or more inhibitor(s); c) an aprotic solvent; d) a glycol ether; and e) water. The present invention also relates to a kit comprising said composition in combination with an oxidant and optionally a stabilizer of the oxidant, and the use thereof.

Abstract: The present invention relates to a novel composition that may be used to control the etching rate of TIN with respect to W, and remove any residues from the surface, e.g. organic or inorganic residues that could contain fluorine (F), which composition comprises a) an aliphatic or aromatic sulfonic acid; b) one or more inhibitor(s); c) an aprotic solvent; d) a glycol ether; and e) water. The present invention also relates to a kit comprising said composition in combination with an oxidant and optionally a stabilizer of the oxidant, and the use thereof.

Abstract: Real-time clinical diagnostic expert systems for fluorescent spectrum analysis of tissue cells and methods thereof. An exemplary system includes a set of optical fibers, wherein the first optical fiber introduces an incident light to an subject epidermal tissue, and the second optical fiber receives an auto-fluorescent signal, a set of monochromators, wherein the first monochromator produces the incident light, and the second monochromator produces the auto-fluorescent signal from the second optical fiber, a light detector for detecting the auto-fluorescent signal from the second monochromator, a signal processing unit for plotting a spectrum of the auto-fluorescent signal, and a spectrum analyzing unit comprising a database for analyzing the spectrum with the database to obtain a probability of disease for the subject epidermal tissue.