Abstract: In an embodiment, a method includes forming active devices over a semiconductor substrate; forming an interconnect structure over the semiconductor substrate, the interconnect structure comprising a contact pad embedded in a dielectric layer; forming a first passivation layer over the interconnect structure; forming a first opening through the first passivation layer to expose the contact pad; depositing a seed layer over the first passivation layer and in the first opening; forming a sacrificial material over the seed layer; patterning the sacrificial material to reform the first opening and to form a second opening; depositing conductive material to form a first redistribution line in the first opening and a second redistribution line in the second opening; removing the sacrificial material; and attaching an integrated circuit die to the first redistribution line and the second redistribution line.

Abstract: A light emitting diode (LED) substrate includes a sapphire substrate which is characterized by having a surface consisting of irregular hexagonal pyramid structures, wherein a pitch of the irregular hexagonal pyramid structure is less than 10 ?m. A symmetrical cross-sectional plane of each of the irregular hexagonal pyramid structures has a first base angle and a second base angle, wherein the second base angle is larger than the first base angle, and the second base angle is 50° to 70°. This LED substrate has high light-emitting efficiency.

Abstract: A light emitting diode (LED) substrate includes a sapphire substrate which is characterized by having a surface consisting of irregular hexagonal pyramid structures, wherein a pitch of the irregular hexagonal pyramid structure is less than 10 ?m. A symmetrical cross-sectional plane of each of the irregular hexagonal pyramid structures has a first base angle and a second base angle, wherein the second base angle is larger than the first base angle, and the second base angle is 50° to 70°. This LED substrate has high light-emitting efficiency.