Patents by Inventor Yi-Song Luo

Yi-Song Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8539907
    Abstract: The invention provides a film deposition apparatus, which includes a first cover and a second cover, wherein the first cover and the second cover are disposed opposite to each other, and the first cover has at least two holes, and a spacer disposed between the first cover and the second cover, wherein the first cover, the spacer and the second cover form a film deposition space.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: September 24, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Wei-Tse Hsu, Chung-Wen Lan, Yi-Song Luo
  • Publication number: 20120132134
    Abstract: The invention provides a film deposition apparatus, which includes a first cover and a second cover, wherein the first cover and the second cover are disposed opposite to each other, and the first cover has at least two holes, and a spacer disposed between the first cover and the second cover, wherein the first cover, the spacer and the second cover form a film deposition space.
    Type: Application
    Filed: April 19, 2011
    Publication date: May 31, 2012
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Wei-Tse Hsu, Chung-Wen Lan, Yi-Song Luo