Patents by Inventor Yi-Yin Chen

Yi-Yin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240420025
    Abstract: Machine learning models can be trained to predict imaging characteristics with respect to variation in a pattern on a wafer resulting from a patterning process. However, due to low pattern coverage provided by limited wafer data used for training, machine learning models tend to overfit, and predictions from the machine learning models deviate from physical trends that characterize the pattern on the wafer and/or the patterning process with respect to the pattern variation. To enhance pattern coverage, training data is augmented with pattern data that conforms to a certain expected physical trend, and applies to new patterns not covered by previously measured wafer data.
    Type: Application
    Filed: November 12, 2022
    Publication date: December 19, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jiaxing REN, Yongfa FAN, Yi-Yin CHEN, Chenji ZHANG, Leiwu ZHENG
  • Patent number: 11624763
    Abstract: A system for measuring impedance which is tolerant of connection errors includes a measuring instrument and a relay plate. The relay plate includes a plurality of relay groups. A relay group comprises a first channel, a second channel, a third channel, and a fourth channel. The first to fourth channels are electrically connected to a conductive pin of the product. The relay board further comprises a first voltage interface, a second voltage interface, a first current interface, and a second current interface, the first voltage interface is electrically connected to the first channel, the first current interface is electrically connected to the second channel, the second voltage interface is electrically connected to the third channel, and the second current interface is electrically connected to the fourth channel, a control unit being able to switch between these when connected to obtain impedance measurements.
    Type: Grant
    Filed: December 9, 2021
    Date of Patent: April 11, 2023
    Assignee: TRIPLE WIN TECHNOLOGY(SHENZHEN) CO.LTD.
    Inventors: Kang Huang, Yi-Yin Chen
  • Publication number: 20230012533
    Abstract: A system for measuring impedance which is tolerant of connection errors includes a measuring instrument and a relay plate. The relay plate includes a plurality of relay groups. A relay group comprises a first channel, a second channel, a third channel, and a fourth channel. The first to fourth channels are electrically connected to a conductive pin of the product. The relay board further comprises a first voltage interface, a second voltage interface, a first current interface, and a second current interface, the first voltage interface is electrically connected to the first channel, the first current interface is electrically connected to the second channel, the second voltage interface is electrically connected to the third channel, and the second current interface is electrically connected to the fourth channel, a control unit being able to switch between these when connected to obtain impedance measurements.
    Type: Application
    Filed: December 9, 2021
    Publication date: January 19, 2023
    Inventors: KANG HUANG, YI-YIN CHEN
  • Patent number: 11487129
    Abstract: An optical integration device includes a first circuit layer comprising a first surface adjacent a first diffractive layer, the first diffractive layer arranged on a side of the first circuit layer along a first direction, and a first connecting pad electrically connected with the first circuit layer through a first conductive member. The optical integration device includes a side surface extending along the first direction. The side surface defines a first concavity extending through the first diffractive layer along the first direction. The first connecting pad includes a first mounting member connected with the side surface, and a first convex member extending from the first mounting member and received in the first concavity. The first conductive member includes a first conductive part arranged between the side surface and the first mounting member, and a second conductive part arranged between the first surface and the first convex member.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: November 1, 2022
    Assignee: TRIPLE WIN TECHNOLOGY (SHENZHEN) CO. LTD.
    Inventors: Jia-Liang Wu, Yi-Yin Chen
  • Publication number: 20220276563
    Abstract: Systems and methods for reducing prediction uncertainty in a prediction model associated with a patterning process are described. These may be used in calibrating a process model associated with the patterning process, for example. Reducing the uncertainty in the prediction model may include determining a prediction uncertainty parameter based on prediction data. The prediction data may be determined using the prediction model. The prediction model may have been calibrated with calibration data. The prediction uncertainty parameter may be associated with variation in the prediction data. Reducing the uncertainty in the prediction model may include selecting a subset of process data based on the prediction uncertainty parameter; and recalibrating the prediction model using the calibration data and the selected subset of the process data.
    Type: Application
    Filed: June 15, 2020
    Publication date: September 1, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Lei WANG, Yi- Yin CHEN, Mu FENG, Qian ZHAO
  • Publication number: 20220179321
    Abstract: A method for training a patterning process model, the patterning process model configured to predict a pattern that will be formed by a patterning process. The method involves obtaining an image data associated with a desired pattern, a measured pattern of the substrate, a first model including a first set of parameters, and a machine learning model including a second set of parameters; and iteratively determining values of the first set of parameters and the second set of parameters to train the patterning process model. An iteration involves executing, using the image data, the first model and the machine learning model to cooperatively predict a printed pattern of the substrate; and modifying the values of the first set of parameters and the second set of parameters such that a difference between the measured pattern and the predicted pattern is reduced.
    Type: Application
    Filed: March 5, 2020
    Publication date: June 9, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Ziyang MA, Jin CHENG, Ya LUO, Leiwu ZHENG, Xin GUO, Jen-Shiang WANG, Yongfa FAN, Feng CHEN, Yi-Yin CHEN, Chenji ZHANG, Yen- Wen LU
  • Publication number: 20210325685
    Abstract: An optical integration device includes a first circuit layer comprising a first surface adjacent a first diffractive layer, the first diffractive layer arranged on a side of the first circuit layer along a first direction, and a first connecting pad electrically connected with the first circuit layer through a first conductive member. The optical integration device includes a side surface extending along the first direction. The side surface defines a first concavity extending through the first diffractive layer along the first direction. The first connecting pad includes a first mounting member connected with the side surface, and a first convex member extending from the first mounting member and received in the first concavity. The first conductive member includes a first conductive part arranged between the side surface and the first mounting member, and a second conductive part arranged between the first surface and the first convex member.
    Type: Application
    Filed: May 12, 2020
    Publication date: October 21, 2021
    Inventors: JIA-LIANG WU, YI-YIN CHEN
  • Patent number: 9448470
    Abstract: A method for making a mask includes receiving an integrated circuit (IC) design layout and identifying at least one targeted-feature-surrounding-location (TFSL) in the IC design layout, wherein TFSL is identified by a model-based approach. The method further includes inserting at least one phase bar (PB) in the IC design layout and performing an optical proximity correction (OPC) to the IC design layout having the at least one PB to form a modified IC design layout. A mask is then fabricated based on the modified IC design layout.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: September 20, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ru-Gun Liu, Shou-Yen Chou, Hoi-Tou Ng, Ken-Hsien Hsieh, Yi-Yin Chen
  • Publication number: 20140365982
    Abstract: A method for making a mask includes receiving an integrated circuit (IC) design layout and identifying at least one targeted-feature-surrounding-location (TFSL) in the IC design layout, wherein TFSL is identified by a model-based approach. The method further includes inserting at least one phase bar (PB) in the IC design layout and performing an optical proximity correction (OPC) to the IC design layout having the at least one PB to form a modified IC design layout. A mask is then fabricated based on the modified IC design layout.
    Type: Application
    Filed: August 21, 2014
    Publication date: December 11, 2014
    Inventors: Ru-Gun Liu, Shou-Yen Chou, Hoi-Tou Ng, Ken-Hsien Hsieh, Yi-Yin Chen
  • Patent number: 8850366
    Abstract: A method for making a mask for an integrated circuit (IC) design includes receiving an IC design layout having a plurality IC features and performing a targeted-feature-surrounding (TFS) checking operation to identify a targeted-feature-surrounding-location (TFSL) in the IC design layout. The method also includes inserting a phase-bar (PB) to the TFSL, performing an optical proximity correction (OPC) to the IC design layout having the PB to form a modified IC design layout and providing the modified IC design layout for fabrication of the mask.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Gun Liu, Shuo-Yen Chou, Hoi-Tou Ng, Ken-Hsien Hsieh, Yi-Yin Chen
  • Publication number: 20140040838
    Abstract: A method for making a mask for an integrated circuit (IC) design includes receiving an IC design layout having a plurality IC features and performing a targeted-feature-surrounding (TFS) checking operation to identify a targeted-feature-surrounding-location (TFSL) in the IC design layout. The method also includes inserting a phase-bar (PB) to the TFSL, performing an optical proximity correction (OPC) to the IC design layout having the PB to form a modified IC design layout and providing the modified IC design layout for fabrication of the mask.
    Type: Application
    Filed: August 1, 2012
    Publication date: February 6, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ru-Gun Liu, Shuo-Yen Chou, Hoi-Tou Ng, Ken-Hsien Hsieh, Yi-Yin Chen
  • Patent number: 7566852
    Abstract: An exemplary driving circuit (400) for a backlight module includes a control circuit (420), a first driving branch circuit (440), a second driving branch circuit (450), and a light source (430). The control circuit is configured for providing a driving signal to the light source via the first driving branch circuit, and the second driving branch circuit is configured for providing a substitution driving signal to the light source according to intensity of ambient light beams. The first and second driving branch circuits are configured for driving the light source alternatively.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: July 28, 2009
    Assignees: Innocom Technology (Shenzhen) Co., Ltd., Innolux Display Corp.
    Inventors: Wei Zhou, Yi-Yin Chen
  • Publication number: 20090079891
    Abstract: An integrated circuit for a liquid crystal panel (20) includes a booster circuit (221), which has a plurality of output terminals (225); a control circuit (222); a register (223); and a plurality of switchers (224). Each switch has a control terminal (2241) being connected to the register, a first terminal (2242) being connected to the output terminal of the booster circuit, and a second terminal (2243) being connected to the control circuit.
    Type: Application
    Filed: September 24, 2007
    Publication date: March 26, 2009
    Inventors: Li-Ya Li, Yi-Yin Chen
  • Publication number: 20080192035
    Abstract: An exemplary liquid crystal display (200) includes an LCD panel (210), a driving integrated circuit (IC) (220) provided with the LCD panel and configured for driving the LCD panel to display image, and an initialization IC (240) provided with the LCD panel and configured for initializing the driving IC at each time that the LCD is turned on. In a test of the LCD panel to detect whether there are any abnormalities, the driving IC mounted on the LCD panel can be initialized by the initialization IC.
    Type: Application
    Filed: February 12, 2008
    Publication date: August 14, 2008
    Inventors: Sai-Xin Guan, Yi-Yin Chen
  • Publication number: 20080158221
    Abstract: An exemplary liquid crystal display (20) includes a liquid crystal panel, a driving chip (200) and an external resistor (270). The driving chip is configured for driving the liquid crystal panel. The driving chip includes a storage circuit (210) and a voltage generator (260). The storage circuit includes a memory (240). The external resistor is connected to the storage circuit and the voltage generator. The voltage generator outputs a voltage, the external resistor divides the voltage into a common voltage. The storage circuit transforms the common voltage to a common voltage parameter, and the memory stores the common voltage parameter. The LCD has high reliability.
    Type: Application
    Filed: December 27, 2007
    Publication date: July 3, 2008
    Inventors: Sai-Xin Guan, Yi-Yin Chen
  • Publication number: 20080142687
    Abstract: An exemplary driving circuit (400) for a backlight module includes a control circuit (420), a first driving branch circuit (440), a second driving branch circuit (450), and a light source (430). The control circuit is configured for providing a driving signal to the light source via the first driving branch circuit, and the second driving branch circuit is configured for providing a substitution driving signal to the light source according to intensity of ambient light beams. The first and second driving branch circuits are configured for driving the light source alternatively.
    Type: Application
    Filed: December 17, 2007
    Publication date: June 19, 2008
    Inventors: Wei Zhou, Yi-Yin Chen
  • Publication number: 20080035264
    Abstract: An exemplary hot press (2) for bonding electronic devices (31, 32) includes a hot-head (24) and a control device (28). The hot-head includes a plurality of heating members (241). The hot-head includes a plurality of heating members (241) and a pressing end (243) joining same ends of the heating members. The pressing end is configured for pressing a bonding portion of one of the electronic devices. The heating members are configured for converting input electrical energy into heat and transferring the heat to the bonding portion of said one of the electronic devices via the pressing end. The control device is electrically connected with the heating members and configured for controlling the amount of the heat generated by each heating member.
    Type: Application
    Filed: August 13, 2007
    Publication date: February 14, 2008
    Inventor: Yi-Yin Chen
  • Publication number: 20070285384
    Abstract: An exemplary liquid crystal display (LCD) (200) includes an LCD panel (210) and a driving circuit (220). The driving circuit includes a signal generator (221), an LCD panel driver (223), and an interface circuit (225). The signal generator generates data signals, system controlling signals, image controlling signals, and an interface select signal. The interface circuit includes system controlling lines for transmitting the system controlling signals to the LCD panel driver, image controlling lines for transmitting the image controlling signals to the LCD panel driver, data lines for transmitting the data signals to the LCD panel driver, and an interface select line for transmitting the interface select signal to the LCD panel driver. The LCD panel driver electrically connects to either the image controlling lines or the system controlling lines, the connection being according to the a type of the interface select signal transmitted through the interface select line.
    Type: Application
    Filed: June 11, 2007
    Publication date: December 13, 2007
    Inventor: Yi-Yin Chen
  • Publication number: 20070146302
    Abstract: An exemplary display device (400) includes a display module (430), an integrated power supply (410), a display control circuit (420), a safe control circuit (465), a second power supply (460), a first sensor (425), and a second sensor (435). The integrated power supply is configured to provide electric energy to the display module. The second power supply is connected to the display control circuit via the safe control circuit, and is configured to provide electric energy to the display module via the safe control circuit. The safe control circuit is configured to adjust electric energy that is provided to the display module by the second power supply. The first sensor is connected to the display control circuit, and is configured to sense ambient brightness. The second sensor is connected to the display control circuit, and is configured to sense display brightness of the display module.
    Type: Application
    Filed: December 26, 2006
    Publication date: June 28, 2007
    Inventors: Chang-Jun Liu, Yi-Yin Chen, Guo-Liang Hu
  • Publication number: 20070132689
    Abstract: A liquid crystal display panel includes a first substrate, a second substrate opposite to the first substrate, and a liquid crystal layer sandwiched between the first substrate and the second substrate. The first substrate and the second substrate cooperatively form a multiplicity of pixels. The first substrate also includes a pixel pad electrically connected to one of the pixels. According to this configuration, a grayscale voltage of the liquid crystal display panel can be conveniently adjusted.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 14, 2007
    Inventors: Li-Ya Li, Yi-Yin Chen