Abstract: A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit.

Abstract: The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyroscope rotates around a sensitive axis.

Abstract: A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (?T, ?T,0), a quadrature variable (?c, ?C,0) and a restoring variable (?S).

Abstract: A charge balancing circuit is adapted to be connected to an electrode and to a stimulation source. The charge balancing circuit has an electrode terminal for receiving an electrode voltage, an amplifier coupled to the electrode terminal and adapted to amplify and invert the electrode voltage for generating an intermediate voltage and a compensation stage. The compensation stage is adapted to generate an output current if the electrode voltage lies outside a specified safety range and to generate the output current depending on the intermediate voltage. The compensation stage is further adapted to supply the output current to the electrode terminal for driving the electrode voltage towards and/or into the safety range.

Abstract: The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100).

Abstract: A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit.

Abstract: An apparatus for impedance matching of an electrical load to a generator has input connections for connection to the generator and output connections for connection to the load. The apparatus has a converter which connects the input connections to the output connections. An input voltage which is applied between the input connections can be converted into an output voltage. The converter has energy storage means connected to one of the output connections by an active diode, a controllable switching device, and an actuation device. The switching device can be moved to a first and a second switching state so that energy from the generator is stored in the energy storage means in the first switching state. Energy which is stored can be output to the load in the second switching state. A detector is connected to the input connections for detecting a measurement signal for the impedance matching. The actuation device has an activation signal and can be moved to a first and a second operating state.

Abstract: A device for measuring yaw rate, having a mechanical yaw rate sensor, which has an inert mass that can be set into a primary vibration along a primary axis by means of an excitation device and can be deflected along a secondary axis extending transversely with respect to the primary axis so that when a yaw rate occurs about a sensitive axis extending transversely with respect to the primary and to the secondary axis, said device carries out a secondary vibration excited by the Coriolis force. A sensor element detects an amplitude-modulated signal for the secondary vibration. A sigma-delta modulator has a low pass filter connected to the sensor element, a quantizer and a secondary actuator disposed in a feedback path for applying a force which counteracts the Coriolis force.

Abstract: An apparatus (1) for the impedance matching of an electrical load (2) to a generator (3) has input connections (6a, 6b) for connection to the generator (3) and output connections (7a, 7b) for connection to the load (2). The apparatus (1) has a converter (9) which connects the input connections (6a, 6b) to the output connections (7a, 7b) and by means of which an input voltage which is applied between the input connections (6a, 6b) can be converted into an output voltage which is produced between the output connections (7a, 7b). The converter (9) has at least one energy storage means which is connected to at least one of the output connections (7a, 7b) by means of an active diode (15), a controllable switching device which is connected to said energy storage means, and an actuation device (16) for said switching device.

Abstract: A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

Abstract: A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (?T, ?T,0), a quadrature variable (?c, ?C,0) and a restoring variable (?S).

Abstract: A voltage supply has a plurality of voltage sources to supply output connections. To achieve closed-loop control of the output voltage at the output connections, a closed-loop control circuit is provided that has an actuating element for each voltage source, and each respective actuating element has a current path via which a connection of the respective voltage source can be connected to an output connection. Each actuating element has an actuating signal input for setting the electrical conductivity of its current path. The closed-loop control circuit has a closed-loop controller to which the output voltage and a desired voltage signal are supplied. When a deviation occurs between the output voltage and the desired voltage signal, the closed-loop controller interacts with at least one actuating signal input in order to reduce the deviation.

Abstract: In a method for determining the relative position, velocity, acceleration, and/or the rotation center of a body displaceable in a three dimensional space, at least twelve linear acceleration sensors are provided and in each case arranged on a position which is stationarily fixed with respect to the body. At least one acceleration measurement signal is captured by the linear acceleration sensors. A position, velocity, acceleration, and/or rotation center signal is generated for the body from the acceleration measurement signal and data describing the position and orientation of the linear acceleration sensors in the body-fixed coordinate system.

Abstract: A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

Abstract: A voltage supply has a plurality of voltage sources to supply output connections. To achieve closed-loop control of the output voltage at the output connections, a closed-loop control circuit is provided that has an actuating element for each voltage source, and each respective actuating element has a current path via which a connection of the respective voltage source can be connected to an output connection. Each actuating element has an actuating signal input for setting the electrical conductivity of its current path. The closed-loop control circuit has a closed-loop controller to which the output voltage and a desired voltage signal are supplied. When a deviation occurs between the output voltage and the desired voltage signal, the closed-loop controller interacts with at least one actuating signal input in order to reduce the deviation.

Abstract: In a method for determining the relative position, velocity, acceleration, and/or the rotation center of a body displaceable in a three dimensional space, at least twelve linear acceleration sensors are provided and in each case arranged on a position which is stationarily fixed with respect to the body. At least one acceleration measurement signal is captured by the linear acceleration sensors. A position, velocity, acceleration, and/or rotation center signal is generated for the body from the acceleration measurement signal and data describing the position and orientation of the linear acceleration sensors in the body-fixed coordinate system.

Abstract: The present invention relates to a controlled current source having a control input, in particular for digital/analogue converters in continuous-time sigma/delta modulators, having a current source (4) with a control input which generates an output current dependent on a control voltage applied to the control input, and having a controller (7) for converting a clock signal into a voltage signal, with the controller (7) being connected to the current source (4) in such a manner that the voltage signal is applied as a control voltage to the control input of the current source (4). The controller is designed to is designed to convert the clock signal into a voltage signal which has within a clock duration a reproducible curve ending with a falling flank. Using the present controlled current source in a digital/analogue converter in a feedback branch of a continuous-time sigma/delta modulator permits realizing a sigma/delta modulator which is essentially insensitive to clock jitter.

Abstract: The present invention relates to a controlled current source having a control input, in particular for digital/analogue converters in continuous-time sigma/delta modulators, having a current source (4) with a control input which generates an output current dependent on a control voltage applied to the control input, and having a controller (7) for converting a clock signal into a voltage signal, with the controller (7) being connected to the current source (4) in such a manner that the voltage signal is applied as a control voltage to the control input of the current source (4). The controller is designed to is designed to convert the clock signal into a voltage signal which has within a clock duration a reproducible curve ending with a falling flank. Using the present controlled current source in a digital/analogue converter in a feedback branch of a continuous-time sigma/delta modulator permits realizing a sigma/delta modulator which is essentially insensitive to clock jitter.

Abstract: A conductivity measuring device has a current source device connected to current supply elements through which a substantially square-wave current can be fed into a liquid, and a measuring circuit for determining the voltage drop in the liquid between voltage measuring elements.