Abstract: A shield assembly for a sputter deposition chamber, the shield assembly including an outer sleeve with a gas inlet to conduct a gas through the outer sleeve and an inner sleeve disposed within the outer sleeve, the inner sleeve including gas channels on a surface mating with the outer sleeve to conduct the gas between the inner and outer sleeves. The shield assembly may further include an aperture ring adjacent to a first end of both the inner and outer sleeves, the aperture ring including a plurality of gas outlets to conduct the gas from the gas channels and an inner aperture flange extending from the plurality of gas outlets and adjacent to gas shield flange to form a gas runway for conducting the gas toward a sputter target located within the deposition chamber.

Abstract: Apparatus and method for cooling a recording media disk in a deposition system. A manifold spacer including an input port to receive a coolant gas and a first output port to output the coolant gas couples a pair of cooling plates together, the pair of cooling plates having opposing surfaces spaced apart by the manifold spacer to accommodate a passage of disks to be cooled. A first shower manifold is coupled to a first of the pair of cooling plates, the first shower manifold receives the coolant gas from the first output port in the manifold spacer and outputs the coolant gas flow in a first direction perpendicular to the opposing cooling plate surfaces and toward the media disk to be cooled.

Abstract: Embodiments of the present invention include a substrate holder apparatus comprising a plate configured with an opening designed to receive a substrate; and a plurality of gripper assemblies disposed around the opening and configured to hold the substrate at a predetermined position within the opening such that the substrate is substantially coplanar with respect to a surface of the plate, at least one of the gripper assemblies comprising: a support element configured to grip an outside edge of the substrate, the support element mounted to a mount assembly configured to be attached to the substrate holder apparatus such that the support element holds the substrate at the predetermined position with respect to the plate.

Abstract: A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.

Abstract: A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.