Abstract: A method and apparatus for sensing accelerations directed along multiple directions are provided. An embodiment comprises a sensor array comprising two sensor pairs, each of which provides an output signal based on acceleration along two orthogonal directions. The sensor pairs are so that they collectively provide an output signal for each of three mutually orthogonal directions. In some embodiments, the sensor array is augmented to provide three additional signals, each of which is based on rotation about an axis aligned with one of the three orthogonal directions.

Abstract: A method and apparatus for sensing accelerations directed along multiple directions are provided. An embodiment comprises a sensor array comprising two sensor pairs, each of which provides an output signal based on acceleration along two orthogonal directions. The sensor pairs are so that they collectively provide an output signal for each of three mutually orthogonal directions. In some embodiments, the sensor array is augmented to provide three additional signals, each of which is based on rotation about an axis aligned with one of the three orthogonal directions.

Abstract: A fabrication process based fabrication, modeling and analysis tool that allows the user to accurately design, visualize, simulate, and analyze the design of a micro-electro mechanical (MEMS) or other semiconductor device through a computer aided simulation of its actual fabrication process. The preferred embodiment creates a creates a model of both a device having the desired parameters and attributes and the necessary fabrication steps in the fabrication process to yield that device. The tool is suitable for implementation on existing general purpose computers.