Patents by Inventor Yie-Min Wu

Yie-Min Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cleaning a furnace torch
    Patent number: 6676769
    Abstract: An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture body and a cleaning bath. The fixture body is formed of cylindrical shape with a top ring, a bottom ring and three support rods connecting the two rings together. The top ring is provided with an outwardly extending flange portion for engaging an opening in a cleaning bath for supporting and suspending the fixture body in the bath. The bottom ring is equipped with a pair of symmetrically positioned, inwardly extending arcuate-shaped flange portions adapted for supporting an edge of a bottom surface of the furnace torch in the cleaning bath.
    Type: Grant
    Filed: November 6, 2001
    Date of Patent: January 13, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: June-Yie Kao, Yie-Min Wu, Ming-Hsun Yang, Chii-Shing Yang
  • Apparatus and method for cleaning a furnace torch
    Publication number: 20030084923
    Abstract: An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture body and a cleaning bath. The fixture body is formed of cylindrical shape with a top ring, a bottom ring and three support rods connecting the two rings together. The top ring is provided with an outwardly extending flange portion for engaging an opening in a cleaning bath for supporting and suspending the fixture body in the bath. The bottom ring is equipped with a pair of symmetrically positioned, inwardly extending arcuate-shaped flange portions adapted for supporting an edge of a bottom surface of the furnace torch in the cleaning bath.
    Type: Application
    Filed: November 6, 2001
    Publication date: May 8, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: June-Yie Kao, Yie-Min Wu, Ming-Hsun Yang, Chii-Shing Yang