Patents by Inventor Yien-Yuan Yang

Yien-Yuan Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and fixture for mounting process equipment
    Patent number: 6134850
    Abstract: A method for earthquake-proof mounting a semiconductor process machine on a removable floor (or a raised floor) in a semiconductor fabrication plant. In the method, a modified I-beam which has a horizontally extending upper flange is provided for mounting under a removable floor and attaching through the floor directly to a process machine situated on top of the floor. The process machine may be attached to the modified I-beam through an L-shaped bracket that is attached to the support frame of the process machine with the horizontal flange of the bracket attached to the modified I-beam through apertures in the removable floor. The present invention further comprises an earthquake-proof mounting fixture for mounting a process machine on a removable floor in a semiconductor fabrication plant.
    Type: Grant
    Filed: February 3, 1999
    Date of Patent: October 24, 2000
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Ming-Chu Hui, Bo-Han Hsieh, Chuan-Yi Wang, Yien-Yuan Yang