Abstract: An apparatus and fabrication process for a capacitor formed in conjunction with a dual damascene process. A bottom capacitor plate is electrically connected to an overlying first conductive via formed according to the dual damascene process. A top capacitor plate is connected to an overlying second conductive via. A dielectric material is disposed between the top and the bottom plates. The capacitor is formed by successively forming the bottom plate, the dielectric layer, and the top plate, patterning these layers as required after their formation. The first conductive via is formed over and electrically connected to the bottom plate and the second conductive via is formed over and connected to the top capacitor plate thereby providing for interconnection of the capacitor to other circuit elements by way of the dual damascene conductive runners connected to the conductive vias.

Abstract: An apparatus and fabrication process for a capacitor formed in conjunction with a dual damascene process. A bottom capacitor plate is electrically connected to an overlying first conductive via formed according to the dual damascene process. A top capacitor plate is connected to an overlying second conductive via. A dielectric material is disposed between the top and the bottom plates. The capacitor is formed by successively forming the bottom plate, the dielectric layer, and the top plate, patterning these layers as required after their formation. The first conductive via is formed over and electrically connected to the bottom plate and the second conductive via is formed over and connected to the top capacitor plate thereby providing for interconnection of the capacitor to other circuit elements by way of the dual damascene conductive runners connected to the conductive vias.

Abstract: The present invention provides a method of manufacturing an integrated circuit using a conditioning wheel status indicator with a polishing apparatus having a conditioning wheel and a polishing pad. In one embodiment, the conditioning wheel status indicator comprises a drive motor, an ammeter, and an indicator. The drive motor is coupled to the conditioning wheel and configured to rotate the conditioning wheel against the polishing pad at a prescribed rotation rate. The ammeter is coupled to the drive motor and configured to measure a current of the drive motor. The current registered is a nominal current when the conditioning wheel is new. The indicator is coupled to the ammeter and configured to register an excess current that exceeds the nominal current when the conditioning wheel has incurred an undesirable degree of wear.