Patents by Inventor Yigal Alon

Yigal Alon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of high aspect ratio plug fill
    Patent number: 8236691
    Abstract: A method of plug fill for high aspect ratio plugs wherein a nucleation layer is formed at a bottom of a via and not on the sidewalls. The plug fill is in the direction from bottom to top of the via and not inwards from the sidewalls. The resulting plug is voidless and seamless.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: August 7, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Yakov Shor, Semeon Altshuler, Maor Rotlain, Yigal Alon, Dror Horvitz
  • METHOD OF HIGH ASPECT RATIO PLUG FILL
    Publication number: 20100167532
    Abstract: A method of plug fill for high aspect ratio plugs wherein a nucleation layer is formed at a bottom of a via and not on the sidewalls. The plug fill is in the direction from bottom to top of the via and not inwards from the sidewalls. The resulting plug is voidless and seamless.
    Type: Application
    Filed: December 31, 2008
    Publication date: July 1, 2010
    Inventors: Yakov Shor, Semeon Altshuler, Maor Rotlain, Yigal Alon, Dror Horvitz