Patents by Inventor Yigal Dafne

Yigal Dafne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for achieving via step coverage symmetry
    Patent number: 5126029
    Abstract: A magnetron sputtering apparatus and method for achieving via step coverage symmetry in a process for depositing a metal layer over a semiconductor substrate relies upon simultaneous rotational and lateral movements of the magnetron. When the magnetron is rotated and and moved laterally at the same time, the uniformity of the magnetic field across the target is improved significantly compared to prior art magnetron sputtering systems. Simultaneous rotational and lateral movements are achieved utilizing a planetary gear system.
    Type: Grant
    Filed: December 27, 1990
    Date of Patent: June 30, 1992
    Assignee: Intel Corporation
    Inventors: Yigal Tomer, Yigal Dafne