Abstract: A dry cleaning and surface treatment equipment used for a biochip or a medical tools includes a sealable chamber provided for putting a biochip, an ozone generator for supplying ozone to the sealable chamber, and a fluid transmission device filled with a chemical reactant. The sealable chamber includes a heater, a gas outlet, and a gas inlet interconnected with the ozone generator. The fluid transmission device is disposed outside the sealable chamber and includes a trace transmission pipe extended to the fluid transmission device. The sealable chamber further includes an evaporation container, and the trace transmission pipe of the fluid transmission device is extended to a corresponding position of the evaporation container for injecting the chemical reactant into the evaporation container.