Patents by Inventor Yil-Cheng Lin

Yil-Cheng Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150101959
    Abstract: One or more pods for adjusting at least one of an oxygen content or a water content therein and methods of their use are provided, where one or more semiconductor wafer are selectively stored within a storage chamber of the pod. The pod comprises a storage chamber having a side wall surface defining an opening at one side thereof and a pod door fitted to the storage chamber at the opening so as to provide ingress and egress to the storage chamber. The pod door comprises a door body, a first door locking mechanism on the door body and a seal band configured to engage the sidewall surface. The first door locking mechanism comprises a first pressure applicator, a first key assembly and a first connector-rod.
    Type: Application
    Filed: October 11, 2013
    Publication date: April 16, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: You-Hua Chou, Chih-Wei Huang, Yil-Cheng Lin