Patents by Inventor Yim-Bum Patrick Kwan

Yim-Bum Patrick Kwan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Diaphragm changing device
    Patent number: 7684125
    Abstract: The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.
    Type: Grant
    Filed: December 18, 2003
    Date of Patent: March 23, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Hermann Bieg, Thomas Bischoff, Uy-Liem Nguyen, Stefan Xalter, Marcus Will, Yim-Bum Patrick Kwan, Michael Muehlbeyer