Abstract: The present invention provides a surface treatment method of cerium oxide, comprising S1: adding a first additive to deionized water, stirring uniformly, adding cerium oxide particles, and then transferring the solution to an ultrasonic tank, ultrasonically dispersing it for 10-90 min until the cerium oxide particles are dispersed uniformly; S2: adding a second additive to the above dispersed solution, stirring uniformly, transferring it to an ultrasonic tank, ultrasonically dispersing it for 30-180 min, until the cerium oxide particles are evenly dispersed. By adding cation-containing polymer molecules, polymerized ion pairs are achieved through charge attraction, realizing double-layer coating on the surface of cerium oxide. The double-coated cerium oxide particles have a high polishing rate and leveling efficiency, much higher than the traditional alkaline ILD polishing solution with silicon oxide as the abrasive particle.

Abstract: The present disclosure provides an insulating film polishing solution, comprising: cerium oxide, an anionic polymer, a cationic polymer, an insulating film inhibitor, and water, wherein the pattern polishing rate of the polishing rate of the insulating film polishing solution is more than 5 times that of non-pattern polishing rate. The insulation film polishing solution in the present invention has good stability and can realize an automatic stop function.