Abstract: A transparent ceramic substrate is covered by a photocatalyst layer, at least partially. The photocatalyst layer includes a semiconductor material that, upon exposure to electromagnetic radiation, forms a plurality of electrons and a plurality of holes that remain confined to the photocatalyst layer. The transparent ceramic substrate has a diameter that is larger than the wavelength of the electromagnetic radiation for light trapping.

Abstract: A semiconductor structure includes a plurality of memory levels stacked in a first direction, each of the plurality of memory levels including a semiconductor layer, a word line metal layer, and an interface on a cross section of the semiconductor layer, a spacer between adjacent memory levels of the plurality of memory levels in the first direction, and a bit line in contact with the interface of each of the plurality of memory levels, the bit line extending in the first direction. The bit line comprises metal material, and the interface comprises silicide.

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a method for processing a substrate comprises forming a plasma reaction between titanium tetrachloride (TlCl4), hydrogen (H2), and argon (Ar) in a region between a lid heater and a showerhead of a process chamber or the showerhead and a substrate while providing RF power at a pulse frequency of about 5 kHz to about 100 kHz and at a duty cycle of about 10% to about 20% and flowing reaction products into the process chamber to selectively form a titanium material layer upon a silicon surface of the substrate.

Abstract: A nanoporous polymer membrane with vertically aligned pore channels can be synthesized through self-assembly of amphiphilic block copolymers on a supporting substrate. The pore surface chemistry can be functionalized for selective anion transport.

Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: A method of making free-standing ALD-coated plasmonic nanoparticles. The method comprises providing a plurality of semiconductor quantum dots. One or more conformal layers of dielectric material are deposited over the quantum dots to form dielectric-coated quantum dots. A conformal metallic nanoshell is deposited over the dielectric-coated quantum dots to form plasmonic nanoparticles. At least one layer chosen from i) the conformal layers of dielectric material and ii) the conformal metallic nanoshell is deposited using a vapor phase atomic layer deposition (ALD) process. Plasmonic nanoparticles and systems employing the nanoparticles are also disclosed.

Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: A nanoporous polymer membrane with vertically aligned pore channels can be synthesized through self-assembly of amphiphilic block copolymers on a supporting substrate.

Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: Apparatus for making atomic layer deposition on powdered materials is provided. Inside a vacuum deposition chamber, a stationary but tilted pan-shaped vessel, or non-stationary pan-shaped vessel that is doing tilting movement continuously or intermittently, is used to accommodate powdered samples. A plowing device with teeth or blades is positioned above the pan-shaped vessel, configured to make rotary or sliding movement so as to make plowing actions to the powdered samples, thereby agitate the powdered samples on the pan-shaped vessel. A flattening structure is positioned above the pan-shaped vessel, configured to make rotary or sliding movement, thereby even out the distribution of the powdered samples. The apparatus may comprise multiple pan-shaped vessels or multiple vacuum chambers.

Abstract: A method of making free-standing ALD-coated plasmonic nanoparticles. The method comprises providing a plurality of semiconductor quantum dots. One or more conformal layers of dielectric material are deposited over the quantum dots to form dielectric-coated quantum dots. A conformal metallic nanoshell is deposted over the dielectric-coated quantum dots to form plasmonic nanoparticles. At least one layer chosen from i) the conformal layers of dielectric material and ii) the conformal metallic nanoshell is deposited using a vapor phase atomic layer deposition (ALD) process. Plasmonic nanoparticles and systems employing the nanoparticles are also disclosed.

Abstract: The present disclosure is directed to biomimetic membranes and methods of manufacturing such membranes that include structural features that mimic the structures of cellular membrane channels and produce membrane designs capable of high selectivity and high permeability or absorptivity. The membrane structure, material and chemistry can be selected to perform liquid separations, gas separation and capture, ion transport and adsorption for a variety of applications.

Abstract: Method and apparatus for making atomic layer deposition on powdered materials are provided. A rotary vessel with tilted rotation axis can be used as the deposition chamber. The rotary vessel can be directly used as the deposition chamber, or the rotary vessel is positioned inside a vacuum chamber that serves as the deposition chamber. A hallow shaft can be used to deliver rotary motion and facilitate pumping. A tube can be inserted into the hollow shaft or the rotary vessel to introduce precursors. Gas diffuser and slowly increased pumping speed can be used to reduce the agitation caused by gas flow. Intermittent rotation, variable rotary speed, extruding structures on inner surface of the rotary vessel, and the addition of easy-to-agitate powder or beads of other materials can be used to enhance the powder agitation caused by rotation.

Abstract: An atomic layer deposition method is disclosed for preparing polypeptides. The method comprises providing a solid-phase support comprising a reactive amine monolayer in an atomic layer deposition (ALD) chamber. The solid-phase support is contacted with a first protected amino acid substituted with a protecting group by atomic layer deposition, wherein the protecting group is bonded to a non-side chain amino group of the protected amino acid. A carboxylic acid group of the first protected amino acid is reacted with the reactive amine monolayer, thereby coupling the first protected amino acid to the solid-phase support to produce a coupled-product.

Abstract: The present disclosure is directed to biomimetic membranes and methods of manufacturing such membranes that include structural features that mimic the structures of cellular membrane channels and produce membrane designs capable of high selectivity and high permeability or adsorptivity. The membrane structure, material and chemistry can be selected to perform liquid separations, gas separation and capture, ion transport and adsorption for a variety of applications.

Abstract: An atomic layer deposition method is disclosed for preparing polypeptides. The method comprises providing a solid-phase support comprising a reactive amine monolayer in an atomic layer deposition (ALD) chamber. The solid-phase support is contacted with a first protected amino acid substituted with a protecting group by atomic layer deposition, wherein the protecting group is bonded to a non-side chain amino group of the protected amino acid. A carboxylic acid group of the first protected amino acid is reacted with the reactive amine monolayer, thereby coupling the first protected amino acid to the solid-phase support to produce a coupled-product.

Abstract: An ultra-thin, catalyzed liquid transport medium-based membrane structure fabricated with a porous supporting substrate may be used for separating an object species such as a carbon dioxide object species. Carbon dioxide flux through this membrane structures may be several orders of magnitude higher than traditional polymer membranes with a high selectivity to carbon dioxide. Other gases such as molecular oxygen, molecular hydrogen, and other species including non-gaseous species, for example ionic materials, may be separated using variations to the membrane discussed.

Abstract: Method and apparatus for making atomic layer deposition on powdered materials are provided. A rotary vessel with tilted rotation axis can be used as the deposition chamber. The rotary vessel can be directly used as the deposition chamber, or the rotary vessel is positioned inside a vacuum chamber that serves as the deposition chamber. A hallow shaft can be used to deliver rotary motion and facilitate pumping. A tube can be inserted into the hollow shaft or the rotary vessel to introduce precursors. Gas diffuser and slowly increased pumping speed can be used to reduce the agitation caused by gas flow. Intermittent rotation, variable rotary speed, extruding structures on inner surface of the rotary vessel, and the addition of easy-to-agitate powder or beads of other materials can be used to enhance the powder agitation caused by rotation.

Abstract: Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.

Abstract: Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.