Abstract: A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 7.5 mm and 12 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.

Abstract: A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 4 mm and 8 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.

Abstract: A miniature fluid control device is provided and includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The resonance plate is assembled and combined with the gas inlet plate. The piezoelectric actuator is assembled and combined with the resonance plate. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric plate. The suspension plate has a first surface and a second surface. The outer frame is arranged around the suspension plate and has an assembling surface. The piezoelectric plate is attached on the second surface. The at least one bracket is formed between the suspension plate and the outer frame as making the first surface of the suspension plate non-coplanar with the assembling surface of the outer frame, so that a specific chamber spacing is maintained between the first surface of the suspension plate and the resonance plate.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.

Abstract: A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.

Abstract: An actuating and sensing module includes a chip, at least one sensor and at least one actuating device. The at least one sensor is deposited on the chip. The at least one actuating device is packaged on the chip and has at least one guiding channel disposed on one side of the at least one sensor. When the at least one actuating device is enabled, a fluid is transferred to the at least one sensor through the at least one guiding channel, so that the fluid is sensed by the at least one sensor.

Abstract: An actuating and sensing module includes a substrate, at least one sensor and at least one actuating device. The at least one sensor is disposed on the substrate. The at least one actuating device is disposed on the substrate, and has at least one guiding channel between the actuating device and the substrate. The at least one guiding channel is disposed on one side of the at least one sensor. When the at least one actuating device is enabled, a fluid is transferred to the at least one sensor through the at least one guiding channel, so that the fluid is sensed by the at least one sensor.

Abstract: A fluid transportation device comprises a valve main body, a valve chamber base, a valve membrane, an actuator and a cover body. The valve main body comprises an inlet passage and an outlet passage. The valve chamber base comprises an inlet valve passage, an outlet valve passage and a compressible chamber communicating therewith. The valve membrane is arranged between the valve main body and the valve chamber base, having two valve plates respectively form a valve switch structure which seal the inlet valve passage and the outlet valve passage. The actuator covers the compressible chamber. The cover body covers the actuator and has a plurality of screw holes, which are corresponding to the penetration holes of the valve main body, the valve chamber base and the actuator, and several locking elements are inserting the penetration holes and locked with the screw holes to assemble the fluid transportation device.

Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction away from the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of vibration plate.

Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.

Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

Abstract: A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A control method of a driving circuit is provided for controlling a piezoelectric actuator of a piezoelectric pump to move a fluid of a fluid reservoir. Firstly, a driving voltage is outputted from the driving circuit. Then, a first inhalation adjusting process is implemented while the piezoelectric pump performs an inhaling operation. In the first inhalation adjusting process, a fluid pressure of the fluid within the fluid reservoir is detected and the fluid pressure is adjusted to the first predetermined inhalation pressure value according to the detecting result. Then, a first exhalation adjusting process is performed while the piezoelectric pump performs an exhaling operation. In the first exhalation adjusting process, the fluid pressure is detected and the fluid pressure is adjusted to the first predetermined exhalation pressure value according to the detecting result.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.