Patents by Inventor Ying Nan LI

Ying Nan LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240173819
    Abstract: A wafer grinding parameter optimization method and an electronic device are provided. The method includes the following. A natural frequency of a grinding wheel spindle of wafer processing equipment is obtained, and a grinding stability lobe diagram is generated accordingly. A grinding speed is selected based on a speed range of the grinding wheel spindle. Multiple grinding parameter combinations are determined based on the grinding speed. Multiple grinding simulation result combinations corresponding to the grinding parameter combinations are generated. A specific grinding parameter combination is selected based on each of the grinding simulation result combinations, and the wafer processing equipment is set accordingly.
    Type: Application
    Filed: September 12, 2023
    Publication date: May 30, 2024
    Applicant: GlobalWafers Co., Ltd.
    Inventors: Chih-Chun Cheng, Wen-Nan Cheng, Meng-Bi Lin, Chi-Feng Li, Tzu-Fan Chiang, Wei-Jen Chen, Chien Hung Chen, Hsiu Chi Liang, Ying-Ru Shih
  • Patent number: 11417609
    Abstract: Semiconductor structures and fabrication methods are provided. The semiconductor structure includes a semiconductor substrate having a dielectric structure and having at least a first region; a plurality of first openings formed in the dielectric structure in the first region; a first barrier member formed in each of the plurality of the first openings; a plurality of second openings formed between adjacent first barrier members and with sidewall surfaces exposing sidewall surfaces of the first barrier members; and a second barrier member formed in each of the plurality second openings.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: August 16, 2022
    Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Deng Feng Ji, Jun Yang, Hong Tao Liu, You He Sha, Chen Xiao Wang, Ying Nan Li
  • Publication number: 20210020582
    Abstract: Semiconductor structures and fabrication methods are provided. The semiconductor structure includes a semiconductor substrate having a dielectric structure and having at least a first region; a plurality of first openings formed in the dielectric structure in the first region; a first barrier member formed in each of the plurality of the first openings; a plurality of second openings formed between adjacent first barrier members and with sidewall surfaces exposing sidewall surfaces of the first barrier members; and a second barrier member formed in each of the plurality second openings.
    Type: Application
    Filed: October 1, 2020
    Publication date: January 21, 2021
    Inventors: Deng Feng JI, Jun YANG, Hong Tao LIU, You He SHA, Chen Xiao WANG, Ying Nan LI
  • Patent number: 10854558
    Abstract: Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having at least a first region; forming a dielectric structure over the semiconductor substrate; forming a plurality of first openings in the dielectric structure in the first region by removing portions of the dielectric structure in the first region; forming a first barrier member in each of the plurality of first openings; forming second openings with sidewall surfaces exposing sidewall surfaces of the first barrier members by removing portions of the dielectric structure between adjacent first openings; and forming a second barrier member in each of the plurality of second openings.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: December 1, 2020
    Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Deng Feng Ji, Jun Yang, Hong Tao Liu, You He Sha, Chen Xiao Wang, Ying Nan Li
  • Publication number: 20190273048
    Abstract: Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having at least a first region; forming a dielectric structure over the semiconductor substrate; forming a plurality of first openings in the dielectric structure in the first region by removing portions of the dielectric structure in the first region; forming a first barrier member in each of the plurality of first openings; forming second openings with sidewall surfaces exposing sidewall surfaces of the first barrier members by removing portions of the dielectric structure between adjacent first openings; and forming a second barrier member in each of the plurality of second openings.
    Type: Application
    Filed: February 26, 2019
    Publication date: September 5, 2019
    Inventors: Deng Feng JI, Jun YANG, Hong Tao LIU, You He SHA, Chen Xiao WANG, Ying Nan LI