Patents by Inventor Ying-Siang Hwang

Ying-Siang Hwang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE
    Publication number: 20130276820
    Abstract: Methods and apparatus for the cleaning PECVD chambers that utilize molecular fluorine as the cleaning material.
    Type: Application
    Filed: August 10, 2011
    Publication date: October 24, 2013
    Inventors: Jean-Charles Cigal, Ying-Siang Hwang, Paul Alan Stockman, Richard Hogle, Stefan Petri
  • DEPOSITION CHAMBER CLEANING USING IN SITU ACTIVATION OF MOLECULAR FLUORINE
    Publication number: 20130239988
    Abstract: Methods and apparatus for the cleaning reaction chambers using molecular fluorine as the cleaning material. The molecular fluorine is dissociated in-situ in the reaction chamber using the chamber RF power source.
    Type: Application
    Filed: August 18, 2011
    Publication date: September 19, 2013
    Inventors: Jean-Charles Cigal, Ying-siang Hwang, Paul Alan Stockman, Stefan Petri
  • Diamond like carbon films
    Patent number: 7268846
    Abstract: Alignment films for use within a liquid crystal display (LCD) and methods for their manufacture are disclosed. Embodiments of the invention generally relate to process conditions that are selected to improve certain properties of the alignment films. The alignment films include a deposited layer of amorphous carbon, a hydrogenated amorphous carbon film or a hydrogenated diamond-like carbon (DLC) film.
    Type: Grant
    Filed: October 31, 2005
    Date of Patent: September 11, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Ying-Siang Hwang, Soo Young Choi
  • Diamond like carbon films
    Publication number: 20060093803
    Abstract: Alignment films for use within a liquid crystal display (LCD) and methods for their manufacture are disclosed. Embodiments of the invention generally relate to process conditions that are selected to improve certain properties of the alignment films. The alignment films include a deposited layer of amorphous carbon, a hydrogenated amorphous carbon film or a hydrogenated diamond-like carbon (DLC) film.
    Type: Application
    Filed: October 31, 2005
    Publication date: May 4, 2006
    Inventors: Ying-Siang Hwang, Soo Choi