Patents by Inventor Yingkit Felix Tsui
Yingkit Felix Tsui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240377659Abstract: The present disclosure provides an optical modulating structure. The optical modulating structure includes a lower member extending along an insulating layer, a first protrusion over the lower member, and a second protrusion over the lower member and separated from the first protrusion. A first mask layer is formed over the optical modulating structure, wherein the first mask layer covers the second protrusion and a first portion of the lower member between the first protrusion and the second protrusion. A first doping region is formed in an exposed portion of the lower member and at least a portion of an exposed sidewall of the first protrusion. A dielectric layer is formed between the first protrusion and the second protrusion. A method for manufacturing the optical modulating structure is also provided.Type: ApplicationFiled: May 10, 2023Publication date: November 14, 2024Inventors: WEN-SHUN LO, YINGKIT FELIX TSUI, JING-HWANG YANG
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Publication number: 20240379808Abstract: A semiconductor device includes a substrate having a P-well region, an N-well region disposed on either side of and abutting the P-well region, and a deep N-well region disposed beneath and abutting both the P-well region and at least part of the N-well region on either side of the P-well region. The semiconductor device further includes a first conductive layer formed over a cathode region of the P-well region, where a Schottky barrier is formed at a junction of the first conductive layer and the P-well region. The semiconductor device further includes a second conductive layer formed over anode regions of the P-well region, where the anode regions are disposed on either side of the cathode region.Type: ApplicationFiled: July 22, 2024Publication date: November 14, 2024Inventors: Wen-Shun Lo, Yu-Chi Chang, Yingkit Felix Tsui
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Patent number: 12140796Abstract: In some embodiments, the present disclosure relates to a device having a first waveguide and a second waveguide arranged over a substrate. The first waveguide has a first input terminal and a first output terminal, wherein the first input terminal is configured to receive light. The second waveguide is arranged laterally beside the first waveguide and has a second input terminal and a second output terminal. The second input terminal of the second waveguide is configured to receive light. The first waveguide further includes a first portion that has a different structure than surrounding portions of the first waveguide. The second waveguide further includes a second portion that has a different structure than surrounding portions of the second waveguide. The first waveguide is spaced apart at a maximum distance from the second waveguide at the first portion and the second portion.Type: GrantFiled: August 3, 2021Date of Patent: November 12, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Min-Hsiang Hsu, Cheng-Tse Tang, Hau-Yan Lu, Yingkit Felix Tsui
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Publication number: 20240369764Abstract: A semiconductor structure includes a grating coupler structure, a circuit component separated from the grating coupler structure, an inter level dielectric layer, a capping layer over the inter level dielectric layer, and a passivation layer over the capping layer. The inter level dielectric layer has a first refractive index, the capping layer has second refractive index, and the passivation layer has a third refractive index. The second refractive index is greater than the first refractive index, and is greater than the third refractive index.Type: ApplicationFiled: July 21, 2024Publication date: November 7, 2024Inventors: CHIH-TSUNG SHIH, WEI-KANG LIU, SUI-YING HSU, JING-HWANG YANG, YINGKIT FELIX TSUI
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Publication number: 20240361524Abstract: Some implementations described herein include a photonics integrated circuit device including a photonics structure. The photonics structure includes a waveguide structure and an optical attenuator structure. In some implementation, the optical attenuator structure is formed on an end region of the waveguide structure and includes a metal material or a doped material. In some implementations, the optical attenuator structure includes a gaussian doping profile within a portion of the waveguide structure. The optical attenuator structure may absorb electromagnetic waves at the end of the waveguide structure with an efficiency that is improved relative to a spiral optical attenuator structure or metal cap optical attenuator structure.Type: ApplicationFiled: July 8, 2024Publication date: October 31, 2024Inventors: Wei-kang LIU, Chih-Tsung SHIH, Hau-Yan LU, YingKit Felix TSUI, Lee-Shian JENG
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Publication number: 20240353625Abstract: Some embodiments relate to an integrated chip (IC) including a handle substrate; a semiconductor layer comprising a grating coupler region and an edge coupler region; an insulative layer between the handle substrate and the semiconductor layer; a grating coupler in the grating coupler region comprising a plurality of trenches arranged in the semiconductor layer; and an edge coupler in the edge coupler region of the semiconductor layer including: a base structure having an end proximate to an edge of the insulative layer, and tapered sidewalls extending laterally from the end; and an upper structure extending over the base structure, the upper structure having an end proximate to the edge of the insulative layer, and tapered sidewalls extending laterally from the end between the tapered sidewalls of the base structure; where the handle substrate continuously extends from directly beneath the plurality of trenches to directly beneath the upper structure.Type: ApplicationFiled: April 18, 2023Publication date: October 24, 2024Inventors: Hau-Yan Lu, Wei-Kang Liu, Yingkit Felix Tsui
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Publication number: 20240353617Abstract: A waveguide structure and an optical modulator structure of a photonic integrated circuit are formed in a dielectric region above a substrate of a semiconductor device. Openings are then formed through the dielectric region and to the substrate so that material can be removed from the substrate to form air gaps between the substrate and the dielectric region. The openings are then sealed by depositing dielectric material in the openings. Sealing the openings reduces the likelihood of exposure of the dielectric region and other regions of the semiconductor device to exposure to environmental elements such as humidity and oxygen. The reduced likelihood of exposure to these environmental elements, due to sealing the openings, may reduce the likelihood and/or rate of formation of defects in the dielectric region and the other regions of the semiconductor device.Type: ApplicationFiled: April 21, 2023Publication date: October 24, 2024Inventors: Wen-Shun LO, Jing-Hwang YANG, YingKit Felix TSUI
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Patent number: 12124083Abstract: A semiconductor structure includes a substrate, a grating coupler structure over the substrate, a multi-layers film structure over the grating coupler structure. The multi-layers film structure include a first layer including a first refractive index, a second layer over the first layer and including a second refractive index and a third layer over the second layer and including a third refractive index. The second refractive index is greater than the first refractive index and is greater than the third refractive index of the third layer, and a thickness of each layer of the multi-layers film structure is within a range from ?/4 to ?2, ? is a wavelength of light.Type: GrantFiled: August 3, 2022Date of Patent: October 22, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chih-Tsung Shih, Wei-Kang Liu, Sui-Ying Hsu, Jing-Hwang Yang, Yingkit Felix Tsui
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Publication number: 20240345320Abstract: Various embodiments of the present disclosure are directed towards a photonic device including a temperature adjustment element. A first waveguide overlies an insulating layer. A second waveguide overlies the insulating layer. The temperature adjustment element includes a heater structure aligned with a segment of the first waveguide and a cooler structure aligned with a segment of the second waveguide. The heater structure is configured to increase a temperature of the segment of the first waveguide to a first temperature. The cooler structure is configured to reduce a temperature of the segment of the second waveguide to a second temperature less than the first temperature.Type: ApplicationFiled: April 14, 2023Publication date: October 17, 2024Inventors: Wei-Kang Liu, Hau-Yan Lu, Yingkit Felix Tsui
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Publication number: 20240329435Abstract: A method of fabricating an optical device comprises steps of forming a silicon-based optical component in a substrate; depositing an ILD layer on the substrate and the silicon-based optical component; forming a thermal tuning assembly comprising a first metallic material in the ILD layer and above the silicon-based optical component, wherein the thermal tuning assembly comprises a core above the silicon-based optical component, a plurality of grids spaced apart from the core, and a pair of neck portions connecting the grids to the core, wherein a width of a strip in each grid is greater than a width of the core; forming at least one conductive plug comprising the first metallic material penetrating the ILD layer and coupled to the silicon-based optical component; and forming a plurality of conductive lines comprising a second metallic material coupled to the thermal tuning assembly.Type: ApplicationFiled: March 28, 2023Publication date: October 3, 2024Inventors: Wen-Shun LO, Jing-Hwang YANG, Yingkit Felix TSUI
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Patent number: 12107136Abstract: A semiconductor device includes a substrate having a P-well region, an N-well region disposed on either side of and abutting the P-well region, and a deep N-well region disposed beneath and abutting both the P-well region and at least part of the N-well region on either side of the P-well region. The semiconductor device further includes a first conductive layer formed over a cathode region of the P-well region, where a Schottky barrier is formed at a junction of the first conductive layer and the P-well region. The semiconductor device further includes a second conductive layer formed over anode regions of the P-well region, where the anode regions are disposed on either side of the cathode region.Type: GrantFiled: May 26, 2022Date of Patent: October 1, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Shun Lo, Yu-Chi Chang, Yingkit Felix Tsui
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Publication number: 20240321723Abstract: Some implementations described herein provide techniques and apparatuses for forming a semiconductor die including a discharge management structure. The discharge management structure may include contact structures (e.g., vertical interconnect access structures, or “vias”) connecting a metal layer to electrode layers of a capacitor structure and to a substrate below the capacitor structure. The contact structures have different cross-sectional areas that, based on Kirchhoff's law, increase a voltage drop between the capacitor structure and the silicon substrate. The voltage drop may reduce a likelihood of an electrical discharge by the capacitor structure that causes damage to the metal layer. By reducing the likelihood of damage to the metal layer, defects that may be associated with vertical interconnect access induced metal island corrosion may be reduced.Type: ApplicationFiled: March 20, 2023Publication date: September 26, 2024Inventors: Shu-Hui SU, Hsin-Li CHENG, YingKit Felix TSUI
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Publication number: 20240310579Abstract: A method for forming an optical waveguide structure includes following operations. A substrate is received. A semiconductor layer is formed on the substrate. The semiconductor layer is patterned to form at least a waveguide in the substrate and at least a trench in the semiconductor layer. A first gap-filling operation is performed to form a first dielectric portion in the trench. A second gap-filling operation is performed to form a second dielectric portion over the first dielectric portion. An air seam is sealed within the second dielectric portion. A third gap-filling operation is performed to form a third dielectric portion over the second dielectric portion.Type: ApplicationFiled: May 24, 2024Publication date: September 19, 2024Inventors: CHIH-TSUNG SHIH, HAU-YAN LU, WEI-KANG LIU, YINGKIT FELIX TSUI
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Publication number: 20240304662Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a conductive base layer overlying a semiconductor substrate. A plurality of conductive pillar structures vertically extending from the conductive base layer in a direction away from the semiconductor substrate. The conductive pillar structures are laterally offset from one another. A plurality of conductive layers and a plurality of capacitor dielectric layers are disposed over the conductive pillar structures. The conductive layers and the capacitor dielectric layers are stacked alternatingly with one another. The conductive layers and the capacitor dielectric layers laterally wrap around outer perimeters of the conductive pillar structures.Type: ApplicationFiled: June 7, 2023Publication date: September 12, 2024Inventor: Yingkit Felix Tsui
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Patent number: 12085751Abstract: Some implementations described herein include a photonics integrated circuit device including a photonics structure. The photonics structure includes a waveguide structure and an optical attenuator structure. In some implementation, the optical attenuator structure is formed on an end region of the waveguide structure and includes a metal material or a doped material. In some implementations, the optical attenuator structure includes a gaussian doping profile within a portion of the waveguide structure. The optical attenuator structure may absorb electromagnetic waves at the end of the waveguide structure with an efficiency that is improved relative to a spiral optical attenuator structure or metal cap optical attenuator structure.Type: GrantFiled: July 8, 2022Date of Patent: September 10, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-kang Liu, Chih-Tsung Shih, Hau-Yan Lu, YingKit Felix Tsui, Lee-Shian Jeng
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Publication number: 20240264371Abstract: Various embodiments of the present disclosure are directed towards a semiconductor package comprising optically coupled integrated circuit (IC) chips. A first IC chip and a second IC chip overlie a substrate at a center of the substrate. A photonic chip overlies the first and second IC chips and is electrically coupled to the second IC chip. A laser device chip overlies the substrate, adjacent to the photonic chip and the second IC chip, at a periphery of the substrate. The photonic chip is configured to modulate a laser beam from the laser device chip in accordance with an electrical signal from the second IC chip and to provide the modulated laser beam to the first IC chip. This facilitates optical communication between the first IC chip to the second IC chip. Various embodiments of the present disclosure are further directed towards simultaneously aligning and bonding constituents of the semiconductor package.Type: ApplicationFiled: April 3, 2024Publication date: August 8, 2024Inventors: Chih-Tsung Shih, Hau-Yan Lu, Wei-Kang Liu, Yingkit Felix Tsui
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Publication number: 20240257874Abstract: A memory device includes a first well region, a second well region, and third well regions. The second well region is interposed between the first region and the third well regions, and the third well regions are separated from one another. The memory device includes floating gates disposed over the first to third well regions, wherein each of the floating gates continuously extends from the first well region to a corresponding one of the third well regions. The memory device includes a bit line write region disposed within the second well region. The bit line write region comprises first source/drain regions on opposite sides of each floating gate. The memory device includes a bit line read region disposed within the second well region and spaced from the bit line write region. The bit line read region comprises second source/drain regions on the opposite sides of each floating gate.Type: ApplicationFiled: January 30, 2023Publication date: August 1, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Hsien Chen, Chun-Yao Ko, Liang-Tai Kuo, YingKit Felix Tsui
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Publication number: 20240258302Abstract: Some implementations herein describe apparatuses and techniques related to a semiconductor die package including a first integrated circuit die including capacitor circuitry bonded with a second integrated circuit die including logic circuitry. The semiconductor die package may include discharge paths incorporated into a seal ring structure spanning the first integrated circuit die and the second integrated circuit die. The discharge paths may lead to a power management integrated circuit included in the second integrated circuit die. During a bonding of the first integrated circuit die and the second integrated circuit die, the discharge paths incorporated into the seal ring structure may route an electrical discharge from the capacitor circuitry of the first integrated circuit die to the power management integrated circuit.Type: ApplicationFiled: January 31, 2023Publication date: August 1, 2024Inventors: Shu-Hui SU, Hsin-Li CHENG, YingKit Felix TSUI
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Patent number: 12025835Abstract: An optical waveguide structure of a semiconductor photonic device includes a first semiconductor waveguide, a second semiconductor waveguide, and an air seam between the first and second semiconductor waveguides. The semiconductor waveguides extend in a first direction, and a plurality of air seams extend in a second direction. Each of the air seams is disposed between two adjacent semiconductor waveguides. A distance between the two adjacent semiconductor waveguides is less than a width of each semiconductor waveguide.Type: GrantFiled: August 3, 2022Date of Patent: July 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chih-Tsung Shih, Hau-Yan Lu, Wei-Kang Liu, Yingkit Felix Tsui
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Publication number: 20240178211Abstract: A semiconductor device is provided. The semiconductor device comprises a first semiconductor die comprising a first capacitor, and a second semiconductor die in contact with the first semiconductor die and comprises a diode. The first semiconductor die and the second semiconductor die are arranged along a first direction, and a diode is configured to direct electrons accumulated at the first capacitor to a ground.Type: ApplicationFiled: February 5, 2024Publication date: May 30, 2024Inventors: HSIN-LI CHENG, SHU-HUI SU, YU-CHI CHANG, YINGKIT FELIX TSUI, SHIH-FEN HUANG