Abstract: Embodiments of the present disclosure provide an MEMS switch and an electronic device. The MEMS switch includes: a base substrate; an electrode structure on the base substrate, including a first ground electrode, a signal transmission line, a second ground electrode, a first drive electrode and a third ground electrode which are sequentially arranged on the base substrate at intervals; and a metal beam stretching over the electrode structure, where a first end of the metal beam is electrically connected to the third ground electrode, an orthographic projection of a second end of the metal beam on the base substrate is within an orthographic projection of the signal transmission line on the base substrate, and an orthographic projection of the metal beam on the base substrate is overlapped with an orthographic projection of the first drive electrode on the base substrate.

Abstract: The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.

Abstract: A MEMS switch includes: a substrate, an anchor point, the first signal line, a first driving electrode, a switch beam, and a second signal line. The anchor point is on the substrate. The first signal line and the first driving electrode are on the substrate, and are arranged on two sides of the anchor point. The second signal line is on a side of the anchor point close to the substrate. The switch beam is connected with the anchor point, and two ends of the switch beam are suspended and on the side of the anchor point away from the substrate, an orthographic projection of the switch beam onto the substrate surface coincides at least partially with the orthographic projection of the first signal line onto the substrate surface, and an orthographic projection of the first driving electrode onto the substrate surface, respectively.

Abstract: The present disclosure provides a radio frequency micro-electro-mechanical switch and a radio frequency device, belong to the field of micro-electro-mechanical systems technology, and can at least partially solve a problem that functional performance of an existing radio frequency micro-electro-mechanical switch is easily to be affected in scenarios such as bending deformation of devices.

Abstract: The embodiments of the present disclosure provide an MEMS device and an electronic device. The MEMS device includes: a base substrate; an electrode structure, which is located on the base substrate and includes a first ground electrode, a signal transmission electrode and a second ground electrode, which are sequentially arranged on the base substrate at intervals; a metal film bridge, which spans above the signal transmission electrode and forms a cavity with the signal transmission electrode, where two ends of the metal film bridge are respectively electrically connected to the first ground electrode and the second ground electrode; and a support structure, which is fixedly arranged with the metal film bridge, wherein the Young's modulus of the support structure is greater than the Young's modulus of the metal film bridge.

Abstract: A MEMS switch, a preparation method thereof, and an electronic apparatus. The MEMS switch includes: a substrate, a coplanar waveguide line structure disposed on a side of the substrate, an isolation structure disposed on a side of the coplanar waveguide line structure away from the substrate, a film bridge disposed on a side of the isolation structure away from the substrate. The coplanar waveguide line structure includes a first wire, a first DC bias line, a second wire, a second DC bias line and a third wire arranged at intervals sequentially. The second wire is one of an RF signal transmission line and a ground line, the first wire and the third wire are the other of the RF signal transmission line and the ground line. The film bridge is crossed between the first wire and third wire, and is connected with the first wire and the third wire respectively.

Abstract: The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.

Abstract: Provides are a phase shifter and a communication apparatus. The phase shifter includes a substrate; a signal transmission line on one side of the substrate; a first ground wire and a second ground wire on the same side of the substrate as the signal transmission line, the first and second ground wires are on two sides of the signal transmission line; and capacitance bridges on one side away from the substrate, of a layer where the signal transmission line is, the capacitance bridges are connected with the first and second ground wires, the capacitance bridges span the signal transmission line and are sequentially arrayed in an extension direction of signal transmission line, there is a gap between the capacitance bridges and the signal transmission line in a direction perpendicular to substrate, critical bias voltages are different when capacitance between the capacitance bridges and the signal transmission line reaches the maximum.

Abstract: The present disclosure provides an MEMS switch device and an electronic apparatus. The MEMS switch device includes a base substrate, a membrane bridge structure, and a first ground line, a signal line and a second ground line sequentially arranged on a first side surface of the base substrate at intervals; the membrane bridge structure has a first end electrically connected to the first ground line, and a second end, opposite to the first end, electrically connected to the second ground line; and the membrane bridge structure includes a membrane bridge body structure and at least one protruding structure on the membrane bridge body structure, where the protruding structure protrudes from the membrane bridge body structure in a direction perpendicular to the first side surface of the base substrate.

Abstract: The present disclosure provides a radio frequency micro-electro-mechanical switch and a radio frequency device, belong to the field of micro-electro-mechanical systems technology, and can at least partially solve a problem that functional performance of an existing radio frequency micro-electro-mechanical switch is easily to be affected in scenarios such as bending deformation of devices.

Abstract: The present disclosure provides a flexible MEMS switch, including an MEMS body and a packaging body outside the MEMS body, the packaging body includes a first flexible cover plate and a second flexible cover plate arranged at two opposite sides of the MEMS body respectively, a first cavity is formed between the first flexible cover plate and the MEMS body, and a second cavity is formed between the second flexible cover plate and the MEMS body. The present disclosure further provides a method for manufacturing the flexible MEMS switch.