Patents by Inventor Yingsheng DU

Yingsheng DU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stealth dicing method including filamentation and apparatus thereof
    Patent number: 11646228
    Abstract: The present disclosure provides a stealth dicing method and apparatus. With the method, the focusing element focuses the laser beam on the surface of material to be diced, and the dynamic-equilibrium plasma channel is formed in the material to be diced by means of self-focusing and defocusing effect of plasma generated by ionizing the material to be diced. The modified layer may be formed in the material to be diced throughout the plasma channel, so as to realize stealth dicing.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: May 9, 2023
    Assignees: CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY, EAST CHINA NORMAL UNIVERSITY, UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY
    Inventors: Heping Zeng, Shuai Yuan, Yingsheng Du, Hui Xu, Yuan Nie, Yong Wang, Jin Wang, Jue Yu, Yanying Ma
  • STEALTH DICING METHOD AND APPARATUS
    Publication number: 20210074585
    Abstract: The present disclosure provides a stealth dicing method and apparatus. With the method, the focusing element focuses the laser beam on the surface of material to be diced, and the dynamic-equilibrium plasma channel is formed in the material to be diced by means of self-focusing and defocusing effect of plasma generated by ionizing the material to be diced. The modified layer may be formed in the material to be diced throughout the plasma channel, so as to realize stealth dicing.
    Type: Application
    Filed: July 13, 2020
    Publication date: March 11, 2021
    Inventors: Heping ZENG, Shuai YUAN, Yingsheng DU, Hui XU, Yuan NIE, Yong WANG, Jin WANG, Jue YU, Yanying MA