Patents by Inventor Yinjia LI

Yinjia LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220120675
    Abstract: A single-beam photothermal measurement apparatus and a measurement method for absorptive defects. The apparatus comprises a common-path-type structure and a non-common-path-type structure. The present invention is simple in optical structure and convenient to align and adjustment. The measurement result is stable, and measurement signal anomalies caused by environmental vibration and sample tilt are avoided. By detecting a power change on the edge of a beam spot, the measurement sensitivity of a system is remarkably improved.
    Type: Application
    Filed: December 30, 2021
    Publication date: April 21, 2022
    Inventors: Shijie LIU, Kaizao NI, Jianda SHAO, Weiwei WANG, Tianzhu XU, Yinjia LI, Qi LU