Abstract: A method for cleaning semiconductor substrate without damaging patterned structure on the semiconductor substrate using ultra/mega sonic device comprises applying liquid into a space between a substrate and an ultra/mega sonic device; setting an ultra/mega sonic power supply at frequency f1 and power P1 to drive the ultra/mega sonic device; before bubble cavitation in the liquid damaging patterned structure on the substrate, setting the ultra/mega sonic power supply at zero output; after temperature inside bubble cooling down to a set temperature, setting the ultra/mega sonic power supply at frequency f1 and power P1 again; detecting power on time at power P1 and frequency f1 and power off time separately or detecting amplitude of each waveform output by the ultra/mega sonic power supply; comparing the detected power on time with a preset time ?1, or comparing the detected power off time with a preset time ?2, or comparing detected amplitude of each waveform with a preset value, if the detected power on time

Abstract: A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.

Abstract: The present disclosure provides a preparation method of an efficient and stable catalytic membrane based on a multi-scale hollow molecular sieve fiber, and belongs to the technical field of molecular sieve preparation. The preparation method includes the following steps: mixing a silicon source, an aluminum source, water, and an organic template, and stirring; heating, and adding deionized water; conducting a reaction by hydrothermal synthesis; conducting centrifugation on an obtained suspension, loading by mixing an obtained powder free of a mother liquor with an iron source, and washing and drying; dissolving a treated powder in anhydrous ethanol and conducting an ultrasonic treatment; adding a surfactant to an obtained dispersion, stirring, and conducting the ultrasonic treatment; and conducting coaxial electrospinning and calcination in sequence to obtain the membrane based on a hollow molecular sieve fiber.

Abstract: The present disclosure provides an efficient and stable magnetic nanofiber membrane and a preparation method and use thereof, and belongs to the technical field of composites. The preparation method includes the following steps: dissolving polyacrylonitrile or polystyrene, nZVI particles, and n-octyltrimethylammonium bromide in N,N-dimethylformamide, and mixing uniformly to obtain a spinning solution; subjecting the spinning solution to electrospinning; and vacuum-drying a resulting fiber membrane to obtain the efficient and stable magnetic nanofiber membrane. In the present disclosure, the magnetic nanofiber membrane has a high specific surface area, a desirable porosity, an excellent mechanical strength, and satisfactory magnetic properties.

Abstract: A preparation method of a gradient long-effective catalytic membrane with high-strength and anti-deposition property is provided and includes: adding a nanometal oxide catalyst into an N, N-dimethylformamide solution of polyacrylonitrile or polystyrene, uniformly mixing, performing electrostatic spinning, keeping a receiver at ?190° C. to ?200° C. in the electrostatic spinning process, and performing freeze drying on a precursor membrane obtained after the electrostatic spinning is finished, so as to obtain the gradient long-effective catalytic membrane.

Abstract: A preparation method of a gradient long-effective catalytic membrane with high-strength and anti-deposition property is provided and includes: adding a nanometal oxide catalyst into an N, N-dimethylformamide solution of polyacrylonitrile or polystyrene, uniformly mixing, performing electrostatic spinning, keeping a receiver at ?190° C. to ?200° C. in the electrostatic spinning process, and performing freeze drying on a precursor membrane obtained after the electrostatic spinning is finished, so as to obtain the gradient long-effective catalytic membrane.

Abstract: A preparation method of a lanthanum-iron-loaded carbon nanotube film for environmental restoration is provided, it belongs to the technical field of composite materials. The preparation method includes: mixing carbon nanotubes with a lanthanum-iron mixed solution to obtain a suspension, then obtaining a first reaction solution by a constant temperature oscillation reaction; adding alkali liquor into the first reaction solution to obtain a second reaction solution by an oscillation reaction; carrying out a solid-liquid separation on the second reaction solution, adding the obtained solid after drying into an organic solution, and obtaining a third reaction solution by ultrasonic mixing; centrifuging the third reaction solution to obtain a supernatant; obtaining a lanthanum-iron-loaded carbon nanotube film by suction filtration.

Abstract: A preparation method of a lanthanum-iron-loaded carbon nanotube film for environmental restoration is provided, it belongs to the technical field of composite materials. The preparation method includes: mixing carbon nanotubes with a lanthanum-iron mixed solution to obtain a suspension, then obtaining a first reaction solution by a constant temperature oscillation reaction; adding alkali liquor into the first reaction solution to obtain a second reaction solution by an oscillation reaction; carrying out a solid-liquid separation on the second reaction solution, adding the obtained solid after drying into an organic solution, and obtaining a third reaction solution by ultrasonic mixing; centrifuging the third reaction solution to obtain a supernatant; obtaining a lanthanum-iron-loaded carbon nanotube film by suction filtration.