Patents by Inventor Yiqun Tan

Yiqun Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hotspot correction method
    Patent number: 10325060
    Abstract: A hotspot correction method is provided. The layout patterns in the hotspot regions are accurately corrected by using an ILT method. Then the layout patterns in the extension regions are corrected by using an OPC method. As a result, the layout patterns in the hotspot regions can be accurately corrected while pattern distortion of the extension regions generated due to the regional ILT correction can be prevented. Moreover, high demanding of calculation capability and long calculation time of global ILT correction can be avoided.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: June 18, 2019
    Assignee: SHANGHAI HUALI MICROELECTRONICS CORPORATION
    Inventors: Yiqun Tan, Shirui Yu, Xuan Zhao
  • HOTSPOT CORRECTION METHOD
    Publication number: 20190102507
    Abstract: A hotspot correction method is provided. The layout patterns in the hotspot regions are accurately corrected by using an ILT method. Then the layout patterns in the extension regions are corrected by using an OPC method. As a result, the layout patterns in the hotspot regions can be accurately corrected while pattern distortion of the extension regions generated due to the regional ILT correction can be prevented. Moreover, high demanding of calculation capability and long calculation time of global ILT correction can be avoided.
    Type: Application
    Filed: November 30, 2017
    Publication date: April 4, 2019
    Inventors: Yiqun Tan, Shirui Yu, Xuan Zhao