Patents by Inventor Yi Ting Sun

Yi Ting Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7002226
    Abstract: The present invention relates to a Microelectro mechanical system structure. More specifically the invention relates to utilize a sacrificial layer to fabricate an air bearing structure, followed by forming an aperture, and reducing the aperture to nano-scale by electroplating. And then, by using of two thick film photoresist films for twice electroplating fabrication, for fabricate metal microcoils having high aspect ratio structure and interconnection metal line, to achieve efficiencies of utilizing area and reducing resistance. Moreover, proceed lithography depends on different portions and exposure dose.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: February 21, 2006
    Assignee: National Chiao Tung University
    Inventors: Wensyang Hsu, Han-Ping Shieh, Yi Ting Sun