Abstract: The present invention provides systems and methods for determining the cleanliness of a sample, the method including impinging high pressure fluid pulses on a sample disposed in a chamber to liberate particles therefrom and quantifying a number of the liberated particles to determine the cleanliness of the sample.

Abstract: Determining cleanliness of a sample by providing a continuous flow of clean air into a chamber through a HEPA filter, taking a reference reading of particle counts while the chamber is empty, introducing the sample into the chamber and taking a first reading of a particle count received from all sides of the sample in the chamber to determine loose particles in a particle size range of 0.1 microns up to 5 microns associated with the sample.

Abstract: A method and apparatus for determining cleanliness of a sample is provided. The method includes taking a first reading of particles count of a sample placed into a chamber. The method further includes directing a stream of air over the sample, and taking a second reading of particles count of the sample. The method further includes calculating a difference between the first reading and the second reading, and determining a cleanliness of the sample based upon the difference. The method further includes option of taking an additional reading while a stream of ionized air is directed towards the sample. The method further includes trapping the impurities particles released from the sample by applying a vacuum through the filter, and analyzing the trapped particles to determine nature and chemical composition of the impurities particles.

Abstract: Embodiments of the invention provide a thermal spray method of forming a protective and porous coating over desired surfaces. Further, embodiments provide a thermal arc spray method, such as twin wire arc spray, to coat the surfaces. The invention may refer to using Aluminum and Silicon alloy in a twin wire arc spray method, to create sacrificial and protective coatings on the surfaces, such as substrates and machine parts. Machine parts may be, for example, of sputtering system. The method may utilize a predefined range of Silicon to be alloyed with Aluminum to improve the physical properties of the Aluminum, and further avoid damages to the coated surface, such as de-lamination and flaking of the coatings and coated surfaces. Additionally, generation of defects during a sputtering process may be efficiently reduced.

Abstract: Determining cleanliness of a sample by providing a continuous flow of clean air into a chamber through a HEPA filter, taking a reference reading of particle counts while the chamber is empty, introducing the sample into the chamber and taking a first reading of a particle count received from all sides of the sample in the chamber to determine loose particles in a particle size range of 0.1 microns up to 5 microns associated with the sample.

Abstract: A method and apparatus for determining cleanliness of a sample is provided. The method includes taking a first reading of particles count of a sample placed into a chamber. The method further includes directing a stream of air over the sample, and taking a second reading of particles count of the sample. The method further includes calculating a difference between the first reading and the second reading, and determining a cleanliness of the sample based upon the difference. The method further includes option of taking an additional reading while a stream of ionized air is directed towards the sample. The method further includes trapping the impurities particles released from the sample by applying a vacuum through the filter, and analyzing the trapped particles to determine nature and chemical composition of the impurities particles.

Abstract: Embodiments of the invention provide a thermal spray method of forming a protective and porous coating over desired surfaces. Further, embodiments provide a thermal arc spray method, such as twin wire arc spray, to coat the surfaces. The invention may refer to using Aluminium and Silicon alloy in a twin wire arc spray method, to create sacrificial and protective coatings on the surfaces, such as substrates and machine parts. Machine parts may be, for example, of sputtering system. The method may utilize a predefined range of Silicon to be alloyed with Aluminium to improve the physical properties of the Aluminium, and further avoid damages to the coated surface, such as de-lamination and flaking of the coatings and coated surfaces. Additionally, generation of defects during a sputtering process may be efficiently reduced.