Patents by Inventor Yixi TIAN

Yixi TIAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement of flatness of a susceptor of a display CVD chamber
    Patent number: 10763154
    Abstract: The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: September 1, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Ying Ma, Yixi Tian, Shih Chang Chen, Jin Sun, Rodolfo Perez, Stanley Wu
  • MEASUREMENT OF FLATNESS OF A SUSCEPTOR OF A DISPLAY CVD CHAMBER
    Publication number: 20200071823
    Abstract: The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.
    Type: Application
    Filed: August 28, 2018
    Publication date: March 5, 2020
    Inventors: Ying MA, Yixi TIAN, Shih Chang CHEN, Jin SUN, Rodolfo PEREZ, Stanley WU