Abstract: A substrate heater comprising a ceramic substrate support having a substantially flat upper surface for supporting a substrate during substrate processing; a resistive heater embedded within the substrate support; a heater shaft coupled to a back surface of the substrate support, the heater having an interior cavity that extends along its longitudinal axis and ends at a bottom central surface of the substrate support; and a supplemental heater, separate from the ceramic substrate support, positioned within the interior cavity of the heater shaft in thermal contact with a portion of the bottom central surface of the substrate support such that the supplemental heater can alter the temperature of a central area of the upper surface of the substrate support.

Abstract: Apparatus for use with a processing chamber are provided. In one aspect a blocker plate is provided including an annular plate having an inner portion of a first thickness and the annular plate having an aperture pattern including a center portion, a first patterned portion concentrically disposed around the center portion and comprising a first plurality of apertures having a first number of apertures, an second patterned portion concentrically disposed around the first patterned portion and comprising a second plurality of apertures having a second number of apertures greater than the first number of apertures, a perimeter portion concentrically disposed around the second patterned portion, and an outer portion comprising a raised concentric portion disposed on a perimeter of the annular plate. In another aspect, a second, third, and fourth blocker plates are provided. Additionally, a mixing apparatus and a liquid evaporating apparatus for use in a processing chamber are provided.

Abstract: A vehicle warning system to provide a time-based measure, termed the time-to-last-second-braking time, which is a time buffer that is left for the driver, or control system, to react in order to achieve a desired minimum distance buffer during a collision avoidance process. This measure is based upon a velocity of the host vehicle, an acceleration of the host vehicle, a distance to a lead vehicle, a time rate of change of the distance to the lead vehicle, a relative acceleration between the host and lead vehicles, an acceleration of the host vehicle under maximum braking, and the minimum distance buffer. Various levels of warning may be provided, based upon the value of the time-to-last-second-braking time. Other embodiments are described and claimed.