Patents by Inventor Yll-Seug Park

Yll-Seug Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same
    Patent number: 6604012
    Abstract: A lot dispatching method and system for variably applying the most suitable processing equipment and/or processing condition in a succeeding process of a semiconductor manufacturing process, wherein the succeeding process is influenced by the result of a preceding process. A lot processed by the preceding process is dispatched to the succeeding processing equipment according to a systematic analysis result obtained from a relationship between a process result of the preceding process and an efficiency and the characteristics of a plurality of processing equipment in the succeeding process. A plurality of process conditions for the succeeding process corresponding to the performance of the preceding process is provided. A respective process condition has characteristics that minimize the difference in performance in the succeeding process from a desired or target performance.
    Type: Grant
    Filed: August 23, 2000
    Date of Patent: August 5, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dae-Sik Cho, Hee-Sun Chae, Seok-Hyun Kim, Seung-Hoon Tong, Tae-Yang Yoon, Doh-Soon Kwak, Hee-Se Kang, Yll-Seug Park, Jae-Seok Oh