Abstract: An electron beam irradiation apparatus includes an electron beam emission section having an electron beam irradiating tube that emits an electron beam; an electron beam irradiation section for irradiating the emitted electron beam to a target; a transfer mechanism for transferring the target to the electron beam irradiation section; a rotation mechanism for rotating the target on its own axis when irradiating the electron beam; and a linear movement mechanism for generating a relative linear movement such that the electron beam irradiating tube passes right above the target, between the target and the electron beam irradiating tube, when irradiating the electron beam. The linear movement mechanism generates a relative linear movement such that the electron beam irradiating tube goes from an end portion of the target toward the center of the target and turns back before the center of the electron beam emitting portion of the electron beam irradiating tube reaches the center of the target.