Patents by Inventor Yo-Nien Lin

Yo-Nien Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Smart overlay control
    Patent number: 7031794
    Abstract: An automatic method to maintain and correct overlay in the fabrication of integrated circuits is described. An overlay control table is automatically generated for lots run through a process tool. An overlay correction is calculated from the overlay control table and sent to the process tool for real-time or manual overlay correction.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: April 18, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Kun-Pi Cheng, Hsin-Yuan Chen, Yo-Nien Lin, Feng-Cheng Chung
  • Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement
    Patent number: 6978191
    Abstract: A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.
    Type: Grant
    Filed: September 6, 2003
    Date of Patent: December 20, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yo-Nien Lin, Kuan-Luan Cheng, Kun-Pi Cheng, Hsin-Yuan Chen
  • Smart overlay control
    Publication number: 20050071033
    Abstract: An automatic method to maintain and correct overlay in the fabrication of integrated circuits is described. An overlay control table is automatically generated for lots run through a process tool. An overlay correction is calculated from the overlay control table and sent to the process tool for real-time or manual overlay correction.
    Type: Application
    Filed: September 26, 2003
    Publication date: March 31, 2005
    Inventors: Kun-Pi Cheng, Hsin-Yuan Chen, Yo-Nien Lin, Feng-Cheng Chung