Abstract: Systems and methods for generating volumetric data are disclosed. Such systems and methods may include scanning a sample at a plurality of focal planes located along a depth direction of the sample. Such systems and methods may include generating, via a detector of a metrology sub-system, a plurality of images of a volumetric field of view of the sample at the plurality of focal planes. Such systems and methods may include aggregating the plurality of images to generate volumetric data of the volumetric field of view of the sample. The metrology sub-system may include a Linnik interferometer.

Abstract: A metrology system includes an imaging system. The imaging system may include an objective lens. The metrology system may include one or more detectors. The metrology system may include an objective positioning stage structurally coupled to the objective lens and configured to adjust a focal plane of at least one of the one or more detectors via movement along an optical axis of the metrology system. The metrology system may include one or more proximity sensors configured to measure lateral positions of a stage element as the objective positioning stage moves along the optical axis. The metrology system may be configured to determine a metrology measurement associated with a target on a sample using the images and lateral positions of the stage element when implementing a metrology recipe.

Abstract: A product includes at least one semiconductor substrate, multiple thin-film layers disposed on the at least one substrate, and an overlay target formed in at least one of the thin-film layers. The overlay target includes a first sub-target having a first center of symmetry and including first target features having a first linewidth, and a second sub-target having a second center of symmetry coincident with the first center of symmetry and including second target features, which have a second linewidth, greater than the first linewidth, and are adjacent to but non-overlapping with the first target features.

Abstract: A metrology target for use in measuring misregistration between layers of a semiconductor device including a first target structure placed on a first layer of a semiconductor device, the first target structure including a first plurality of unitary elements respectively located in at least four regions of the first target structure, the first plurality of elements being rotationally symmetric with respect to a first center of symmetry and at least a second target structure placed on at least a second layer of the semiconductor device, the second target structure including a second plurality of elements respectively located in at least four regions of the second target structure, the second plurality of elements being rotationally symmetric with respect to a second center of symmetry, the second center of symmetry being designed to be axially aligned with the first center of symmetry and corresponding ones of the second plurality of elements being located adjacent corresponding ones of the first plurality of e

Abstract: A sample mapping system includes a sample chuck including absolute reference marks, an imaging metrology tool to capture sets of alignment images at locations associated with sample marks on a sample on the sample chuck, and a controller. A particular set of alignment images at a particular location may include at least one alignment image associated with a particular sample mark and at least one alignment image associated with a particular portion of the absolute reference marks within a field of view of the imaging metrology tool visible through the sample. The controller may determine absolute coordinates of the sample marks based on the sets of alignment images. Determining the absolute coordinates of the particular sample mark may include determining the absolute coordinates of the particular sample mark based on a position of the particular sample mark relative to the particular portion of the absolute reference marks.

Abstract: A product includes at least one semiconductor substrate, multiple thin-film layers disposed on the at least one substrate, and an overlay target formed in at least one of the thin-film layers. The overlay target includes a first sub-target having a first center of symmetry and including first target features having a first linewidth, and a second sub-target having a second center of symmetry coincident with the first center of symmetry and including second target features, which have a second linewidth, greater than the first linewidth, and are adjacent to but non-overlapping with the first target features.

Abstract: An optical metrology tool may include one or more illumination sources to generate illumination having wavelengths both within a short-wave infrared (SWIR) spectral range and outside the SWIR spectral range, illumination optics configured to direct the illumination to a sample, a first imaging channel including a first detector configured to image the sample based on a first wavelength range including at least some wavelengths in the SWIR spectral range, a second imaging channel including a second detector configured to image the sample based on a second wavelength range including at least some wavelengths outside the SWIR spectral range, and a controller. The controller may receive first images of the sample from the first detector, receive second images of the sample from the second detector, and generate an optical metrology measurement of the sample based on the first and second images.

Abstract: A method for process control in the manufacture of semiconductor devices including performing metrology on at least one semiconductor wafer included in a given lot of semiconductor wafers, following processing of the at least one semiconductor wafer by a first processing step, generating, based on the metrology, at least one correctable to a second processing step subsequent to the processing step and adjusting, based on the correctable, performance of the second processing step on at least some semiconductor waters of the given lot of semiconductor wafers.

Abstract: A metrology target for use in measuring misregistration between layers of a semiconductor device including a first target structure placed on a first layer of a semiconductor device, the first target structure including a first plurality of unitary elements respectively located in at least four regions of the first target structure, the first plurality of elements being rotationally symmetric with respect to a first center of symmetry and at least a second target structure placed on at least a second layer of the semiconductor device, the second target structure including a second plurality of elements respectively located in at least four regions of the second target structure, the second plurality of elements being rotationally symmetric with respect to a second center of symmetry, the second center of symmetry being designed to be axially aligned with the first center of symmetry and corresponding ones of the second plurality of elements being located adjacent corresponding ones of the first plurality of e

Abstract: Active-gated imaging system and method for imaging environment with at least one high-intensity source. A light source emits light pulses toward the environment, and an image sensor with a pixelated sensor array receives reflected pulses from a selected depth of field and generates a main image. The image sensor exposure mechanism includes a pixelated transfer gate synchronized with the emitted pulses. An image processor identifies oversaturated image portions of the main image resulting from a respective high-intensity source, and interprets the oversaturated image portions using supplementary image information acquired by image sensor.

Abstract: Gated imaging system for gated imaging for generating at least one light pulse, the gated imaging system being mounted on a vehicle, including a pulsed light illuminator, a synchronization controller and at least one sensor, the pulsed light illuminator including a power supply, a light and drive unit and a system level controller, the light and drive unit including at least one semiconductor light source and an electronic driver, the synchronization controller being coupled with the pulsed light illuminator, the semiconductor light source and the sensor, the light and drive unit being coupled with the power supply, and the semiconductor light source being coupled with the electronic driver, the semiconductor light source for generating and emitting the light pulse towards a scene of observation, the electronic driver for providing a drive current to the semiconductor light source and the sensor for receiving reflections of the light pulse from the scene of observation.

Abstract: A system for improving capturing of images of a scene, and data derived from them is provided herein. The system includes a light source configured to illuminate the scene with pulsed light at a specified direction based on predefined gating parameters; two or more capturing devices configured to capture images of the scene, each one of the capturing devices from at different spatial locations, wherein at least one of the capturing is synchronized with the pulsed light, so as to result in stereoscopic fused images of the scene for the synchronized capturing; and a computer processor configured to improve the capturing by using data derived from the gated images and the gating parameters. In another embodiment, the light source is not present and at least one of the sensors' is configured to apply multiple exposures for a single readout, to yield enhanced images that are used to improve the capturing.

Abstract: Pulsed light illuminator for generating at least one light pulse having a predefined rise time and fall time, including a semiconductor light source, an electronic driver coupled with the light source and a synchronization controller coupled with the electronic driver, the electronic driver including an active switch coupled with the light source, a switch driver coupled with the active switch and the controller, a high voltage power supply, a fast voltage provider, a low voltage power supply, a first switch coupled with the low voltage power supply and the light source, a second switch coupled with the high voltage power supply and the light source and an energy discharger coupled with the light source, the light source for generating and emitting the light pulse, the electronic driver for providing a drive current to the light source and the controller for synchronizing a timing of the active switch via a synchronization signal.

Abstract: A method for depth mapping of objects in a scene by a system of a moving/movable platform is disclosed, comprising actively illuminating the scene with pulsed light that is generated by at least one pulsed light illuminator; receiving, responsive to illuminating the scene, reflections on at least one image sensor that comprises a plurality of pixel elements; gating at least one of the plurality of pixel elements of the at least one image sensor for converting the reflections into pixel values for generating reflection-based images that have at least two depth-of-field ranges and an overlapping DOF region; and determining, based on at least one first pixel value of a first DOF in the overlapping DOF region, and based on at least one second pixel value of a second DOF in the overlapping DOF region, depth information of one or more objects located in the overlapping DOF region of the scene.

Abstract: Pulsed light illuminator for generating at least one light pulse having a predefined rise time and fall time, including a semiconductor light source, an electronic driver coupled with the light source and a synchronization controller coupled with the electronic driver, the electronic driver including an active switch coupled with the light source, a switch driver coupled with the active switch and the controller, a high voltage power supply, a fast voltage provider, a low voltage power supply, a first switch coupled with the low voltage power supply and the light source, a second switch coupled with the high voltage power supply and the light source and an energy discharger coupled with the light source, the light source for generating and emitting the light pulse, the electronic driver for providing a drive current to the light source and the controller for synchronizing a timing of the active switch via a synchronization signal.

Abstract: Systems and methods are provided, having sensing unit(s) configured to capture images of a surrounding of a vehicle, and a processing unit connected to a database which is configured to store imaging data relating to the surrounding of the vehicle together with metadata relating to capturing parameters of the stored imaging data. The processing unit enhances the captured images with stored imaging data according to a correspondence of metadata with vehicle situations, for example, according to a relation between capturing parameters of different sensing units. Sensing unit(s) may be gated infrared to indicate specified reflectivity parameters of regions in the captured images. Sensing unit(s) may comprise a controller applying changing patterned filters to the pixel array to enhance visibility and other image features. Multiple sensing units with gateable infrared sensors may communicate using modulated illumination spots.

Abstract: Methods and systems are provided, which illuminate a scene with pulsed patterned light having one or more spatial patterns; detect reflections of the pulsed patterned light from one or more depth ranges in the scene, by activating a detector for detecting the reflections only after respective traveling times of the illumination pulses, which correspond to the depth ranges, have elapsed; and derive an image of the scene from the detected reflections and according to the spatial patterns. The methods and systems integrate gated imaging and structured light synergistically to provide required images which are differentiated with respect to object ranges in the scene and different patterns applied with respect to the objects and their ranges.

Abstract: An apparatus for regulating air pressure level in a tire is provided. The apparatus includes a housing attached to the tire; a piston located inside the housing, coupled to the housing via a spring; a one-way valve; and locking elements located at a specified location along the housing, wherein the piston is configured to move towards a first end of the housing responsive to an imbalance between centrifugal force applied to the piston due to angular speed of the tire and force applied to it by the spring, wherein the locking elements are configured to lock the piston at the specified location whenever the tire reaches a predefined angular speed, and release the piston once the angular speed of the tire crosses a predefined threshold, so that the piston moves towards a second end of the sleeve producing an air pulse, conveyed by the one-way valve into the tire.

Abstract: Imaging system and method, the system including a main detection unit, an auxiliary detection unit, an image processor, and a controller. The main detection unit includes a light source that emits light pulses and a gated image sensor that receives reflections of the light pulses reflected from a selected depth of field in the environment and converts the reflections into a reflection-based image. The auxiliary detection unit includes a thermal sensor that detects infrared radiation emitted from the environment and generates an emission-based image. The image processor processes and detects at least one region of interest in the acquired reflection-based image and/or acquired emission-based image. The controller adaptively controls at least one detection characteristic of a detection unit based on information obtained from the other detection unit. The image processor detects at least one object of interest in the acquired reflection-based image and/or acquired emission-based image.

Abstract: A system for controlling a pixel array sensor with independently controlled sub pixels is provided herein. The system includes at least one image detector, comprising an array of photo-sensitive pixels, each photo-sensitive pixel comprising at least one first type photo-sensitive sub pixel and plurality of second type photo-sensitive sub pixels; and a processor configured to control the at least first type controlled photo-sensitive sub pixel and the plurality of second type second type photo-sensitive sub pixels according to a specified exposure scheme, wherein the processor is further configured to control the at least one first type sub pixel independently of the specified exposure scheme, wherein the processor is further configured to selectively combine data coming from the at least one first type sub pixel with data coming from at least one of the plurality of second type sub pixels.