Patents by Inventor Yoav Nachum

Yoav Nachum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for compensating for magnetic noise
    Patent number: 8389962
    Abstract: A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.
    Type: Grant
    Filed: May 31, 2011
    Date of Patent: March 5, 2013
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Konstantine Chirko, Alon Litman, Yoav Nachum
  • SYSTEM AND METHOD FOR COMPENSATING FOR MAGNETIC NOISE
    Publication number: 20120305763
    Abstract: A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.
    Type: Application
    Filed: May 31, 2011
    Publication date: December 6, 2012
    Inventors: Konstantine Chirko, Alon Litman, Yoav Nachum