Patents by Inventor Yoh Somemura

Yoh Somemura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray exposure mask and fabrication method thereof
    Patent number: 5414746
    Abstract: An X-ray exposure mask comprises an X-ray transmission layer and an X-ray absorption layer formed on the X-ray transmission layer and being patterned. The X-ray absorption layer has a first region having a first thickness and a second region having a second thickness less than the first thickness.
    Type: Grant
    Filed: November 1, 1993
    Date of Patent: May 9, 1995
    Assignee: Nippon Telegraph & Telephone
    Inventors: Kimiyoshi Deguchi, Yoh Somemura, Kazunori Miyoshi, Tadahito Matsuda