Abstract: A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.

Abstract: A liquid ejection apparatus comprising: two flow passages for supplying or recovering a liquid to an element substrate for ejecting the liquid; a circulation supply flow passage for supplying liquid to oneflow passage, a circulation recovery flow passage for recovering liquid from the other flow passage, and a plurality of on-off valve mechanisms for controlling communication and shutoff between the respective flow passages; the on-off valve mechanism comprises an opening located between flow passages, a sealing portion capable of on-off the opening, an urging member for urging the sealing portion in a direction to approach or away from the opening, and a movement mechanism for moving the sealing portion against the urging force of the urging member, the liquid discharge device controls opening and closing of at least two on-off valve mechanisms by moving the scaling parts of at least two on-off valve mechanisms together by the movement mechanism.

Abstract: A charged particle optical system scans a sample with a pulsed charged particle beam and detects secondary charged particles; and a scan image is formed. Control is carried out so that a deflection signal for deflecting the charged particle beam in a first direction, a first timing for pulsed irradiation, a second timing for pulsed irradiation, and a third timing for detection of the secondary charged particles are synchronized. When the deflection amount of the charged particle beam in the time period of the first timing corresponds to the coordinates of n pixels in the scan image, the same line is scanned m times (m < n) while shifting the first timing with respect to the deflection signal so that a location irradiated with the charged particle beam by each scanning has different pixel coordinates. The pixel values at pixel coordinates where a signal is defective are restored.

Abstract: An object of the present disclosure is to provide a system for deriving a type of a defect of a semiconductor element and a non-transitory computer-readable medium. The system receives, from the image acquisition tool, image data obtained by sequentially irradiating a plurality of patterns provided on the semiconductor wafer with a beam and extracts characteristics of the plurality of patterns sequentially irradiated with a beam from the received image data, the characteristics being included in the image data, or receives characteristics of the plurality of patterns sequentially irradiated with a beam from the image acquisition tool, the characteristics being extracted from the image data (Step 603), and derives (Step 605) a type of a defect by referring to (Step 604) related information for the characteristics of the plurality of patterns, the related information storing the characteristics of the plurality of patterns and types of defects in association with each other.

Abstract: A liquid ejection apparatus includes a liquid storing unit capable of storing liquid, a liquid ejection unit including an ejection port that is capable of ejecting the liquid, and a pressure control unit that receives the liquid from the liquid storing unit and allows the liquid having a pressure controlled to be within a predetermined pressure range to be supplied to the liquid ejection unit. Additionally, the liquid ejection apparatus includes a first circulation unit that supplies the liquid having the pressure controlled by the pressure control unit to the ejection port while circulating the liquid between the liquid ejection unit and the pressure control unit, and a second circulation unit that circulates the liquid between the liquid storing unit and the pressure control unit.

Abstract: A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.

Abstract: A method of detecting a defect in a device using a charged particle beam includes inputting a charged particle beam condition, a light condition, and electronic device circuit information, controlling a charged particle beam applied to a sample based on the electron beam condition, controlling light applied to the sample based on the light condition, detecting second electrons emitted from the sample by the application of the charged particle beam and the light, and generating a calculation netlist based on the electronic device circuit information, generating a light irradiation netlist based on the calculation netlist and the light condition, estimating a first irradiation result when the charged particle beam and the light are applied to the sample based on the light irradiation netlist and the charged particle beam condition, and comparing the first irradiation result with a second irradiation result when the charged particle beam and the light are actually applied to the sample based on the electron beam

Abstract: Semiconductor device includes: semiconductor elements electrically connected in parallel; pad portion electrically connected to the semiconductor elements; and terminal portion electrically connected to the pad portion. As viewed in thickness direction, the semiconductor elements are aligned along first direction perpendicular to the thickness direction. The pad portion includes closed region surrounded by three line segments each formed by connecting two of first, second and third vertex not disposed on the same straight line. As viewed in thickness direction, the first vertex overlaps with one semiconductor element located in outermost position in first sense of the first direction. As viewed in the thickness direction, the second vertex overlaps with one semiconductor element located in outermost position in second sense of the first direction. As viewed in the thickness direction, the third vertex is located on perpendicular bisector of the line segment connecting the first and second vertex.

Abstract: An object of the invention is to provide a charged particle beam device capable of specifying an irradiation position of light on a sample when there is no mechanism for forming an image of backscattered electrons. The charged particle beam device according to the invention determines whether an irradiation position of a primary charged particle beam and an irradiation position of light match based on a difference between a first observation image acquired when the sample is irradiated with only the primary charged particle beam and a second observation image acquired when sample is irradiated with the light in addition to the primary charged particle beam. It is determined whether the irradiation position of the primary charged particle beam and the irradiation position of the light match using the first observation image and a measurement result by a light amount measuring device.

Abstract: A liquid ejection apparatus includes a liquid storing unit capable of storing liquid, a liquid ejection unit including an ejection port that is capable of ejecting the liquid, and a pressure control unit that receives the liquid from the liquid storing unit and allows the liquid having a pressure controlled to be within a predetermined pressure range to be supplied to the liquid ejection unit. Additionally, the liquid ejection apparatus includes a first circulation unit that supplies the liquid having the pressure controlled by the pressure control unit to the ejection port while circulating the liquid between the liquid ejection unit and the pressure control unit, and a second circulation unit that circulates the liquid between the liquid storing unit and the pressure control unit.

Abstract: When an accelerator pedal operation amount is large enough to generate a driving force after switching from a stopping range to a starting range is performed, in order to prevent a sudden starting immediately after the range switching, an upper limit of the driving force of a driving source is limited to a driving force larger than a holding threshold value for releasing holding of a stopping state of a vehicle and smaller than a required driving force based on the accelerator pedal operation amount.

Abstract: A liquid ejection apparatus capable of suppressing the amount of liquid to discharge by recovery processing is provided. The liquid ejection apparatus includes: a first path fluidly connected to an ejection port unit and provided with a deformable region; and a second path fluidly connected to the first path via the ejection port unit and provided with a deformable region. Here, a flow of liquid is generated between the first path and the second path by a displacement unit.

Abstract: A regenerative braking control method and a regenerative braking control device of the present invention control a drive source that generates a regenerative brake force in such a manner that an upper limit of regenerative deceleration when a driver executes manual control becomes smaller than an upper limit of regenerative deceleration when automatic control is executed.

Abstract: A control method controls a series hybrid vehicle in which a drive motor and an internal combustion engine are supported in a vehicle body via a plurality of mount members in an integrated state. The control method using a controller generates electric power using an electric power generation motor, and drives the electric power generation motor using motive power of the internal combustion engine. The control method drives a drive wheel with the drive motor using the generated electric power, and causes the drive motor to generate regenerative torque during deceleration. In the control method, the regenerative torque is generated by the drive motor such that an upper limit of the regenerative torque is restricted to a magnitude at which an engine rotational speed where resonance occurs on the vehicle body floor.

Abstract: A drive force control part 5 controls a drive force such that a force caused by a change in the drive force to rearwardly tilt a drive source 1 and push a mount member is made smaller than an external force threshold value. In a first region in which the drive force is equal to or above a predetermined lower limit value, the drive force control part 5 limits a change rate per unit time of the drive force to or below a predetermined maximum rate, and in a second region in which the drive force is smaller than the lower limit value, does not limit the change rate per unit time of the drive force to or below the maximum rate.

Abstract: A vehicle control device controls a vehicle including a drive motor connected to a rotation shaft of wheels, a battery that supplies electricity to the drive motor, and an internal combustion engine connected to the drive motor. The vehicle is equipped with, as traveling modes, a normal mode, and an eco-mode having a larger regenerative braking force than the normal mode obtained such that rotational energy of the wheels is converted into electrical energy. A controller stops the internal combustion engine and switches from the normal mode to the eco-mode when detecting at least an abnormality in the internal combustion engine during traveling of the vehicle.

Abstract: A computing unit generates a to-be-used-in-computation netlist on the basis of a to-be-used-in-calculation device model corresponding to a correction sample, estimates a first application result, on the basis of the to-be-used-in-computation netlist and an optical condition, when a charged particle beam is applied to the correction sample under the optical condition, compares the first application result and a second application result based on a detection signal when the charged particle beam is applied to the correction sample under the optical condition, and corrects the optical condition when the first application result and the second application result differ from each other.

Abstract: A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.

Abstract: A liquid ejection apparatus comprising: two flow passages for supplying or recovering a liquid to an element substrate for ejecting the liquid; a circulation supply flow passage for supplying liquid to oneflow passage, a circulation recovery flow passage for recovering liquid from the other flow passage, and a plurality of on-off valve mechanisms for controlling communication and shutoff between the respective flow passages; the on-off valve mechanism comprises an opening located between flow passages, a sealing portion capable of on-off the opening, an urging member for urging the sealing portion in a direction to approach or away from the opening, and a movement mechanism for moving the sealing portion against the urging force of the urging member, the liquid discharge device controls opening and closing of at least two on-off valve mechanisms by moving the scaling parts of at least two on-off valve mechanisms together by the movement mechanism.

Abstract: Provided is a probe which transmits an ultrasonic wave to a diagnostic site and receives a reception signal which is a reflected wave.