Abstract: There is provided an electricity storage system which comprises an electricity storage device, a charge and discharge switch device which is placed connected to the electricity storage device, a control block which is a charge and discharge control device which controls charging from a power supply and discharging from the electricity storage device to an external load, and an electricity storage device breaker with transmission and reception functions which is provided between the electricity storage device and the charge and discharge switch device, disconnects connection with the electricity storage device according to detection of abnormality of the electricity storage device or according to an instruction of the control block, and notifies the execution of the disconnection to the control block. The control block comprises a hardware disconnection instruction unit in addition to a software disconnection instruction unit.

Abstract: To provide an inexpensive cell incubator for a single cell operation supporting robot having the markers (first and second feature points) required to transform the position of a cell detected on a table coordinate system into a position on the intrinsic coordinate system of the cell incubator. First and second feature points are formed on a film-like feature point setup chip which is then stuck to the cell incubator body such as a conventional dish, thus constituting a cell incubator. Since manufacture of a new die for forming the first and second feature points directly on the cell incubator body is not required, an inexpensive cell incubator for a single cell operation supporting robot can be provided.

Abstract: A method for controlling a motor current supplied to an electric motor by using an inverter device is provided. The inverter device includes an inverter circuit and a capacitor connected to an input of the inverter circuit. The method includes controlling the inverter circuit in such a manner as to supply an alternating electric current to the electric motor after the temperature of the capacitor reaches a temperature at which a maximum acceptable motor current value becomes greater than or equal to a value at which the torque necessary for starting the electric motor is produced.

Abstract: A method for controlling a motor current supplied to an electric motor by using an inverter device is provided. The inverter device includes an inverter circuit and a capacitor connected to an input of the inverter circuit. The method includes controlling the inverter circuit in such a manner as to supply an alternating electric current to the electric motor after the temperature of the capacitor reaches a temperature at which a maximum acceptable motor current value becomes greater than or equal to a value at which the torque necessary for starting the electric motor is produced.

Abstract: The present invention provides a membrane structure having favorable pressure resistance and a manufacturing method of the same. After forming an opening (21a) on a substrate (21) by Deep Digging Reactive Ion Etching (DRIE), vertical streak formed by DRIE on the side face (inner peripheral face) of the opening (21a) is removed by performing light etching with an alkali etchant. The level of overhang of an overhanging section (21b) formed when forming an opening (22a) of a BOX layer (22) is suppressed by suppressing the overetching level when forming the BOX layer (22) by etching.

Abstract: [PROBREMS] To provide an inexpensive cell incubator for a single cell operation supporting robot having the markers (first and second feature points) required to transform the position of a cell detected on a table coordinate system into a position on the intrinsic coordinate system of the cell incubator. [MEANS FOR SOLVING PROBREMS] First and second feature points (P1, P2) are formed on a film-like feature point setup chip (36) which is then stuck to the cell incubator body such as a conventional dish (35), thus constituting a cell incubator (34). Since manufacture of a new die for forming the first and second feature points (P1, P2) directly on the cell incubator body is not required, an inexpensive cell incubator for a single cell operation supporting robot can be provided.

Abstract: In the forming process of buried wirings by filling wiring trenches formed in an insulator with a conductive film mainly made of Cu, the buried wirings are formed to have a uniform-height regardless of the width and density of the wiring trenches. When polishing a barrier conductor film comprised of a Ta film in the CMP process for forming the buried wirings, the polishing agent, which controls the removal rate of the underlying insulator of a silicon oxide film relative to the barrier conductor film to almost one twentieth or less, is used as the slurry, and the pad which is made of polyurethane with a hardness of 75 degrees or more measured by the Type E durometer in conformity with the JIS K6253 and which is comprised of the foam including non-uniform pores with a diameter of about 150 ?m or larger and a density of about 0.4–0.16 g/cm3, is used as the polishing pad.

Abstract: In the forming process of buried wirings by filling wiring trenches formed in an insulator with a conductive film mainly made of Cu, the buried wirings are formed to have a uniform-height regardless of the width and density of the wiring trenches. When polishing a barrier conductor film comprised of a Ta film in the CMP process for forming the buried wirings, the polishing agent which can control the removal rate of the underlying insulator of a silicon oxide film relative to the barrier conductor film to almost one twentieth or less is used as the slurry, and the pad made of polyurethane with a hardness of 75 degrees or more measured by the Type E durometer in conformity with the JIS K6253, which is comprised of the foam including non-uniform pores with a diameter of about 150 ?m or larger and a density of about 0.4-0.6 g/cm3, is used as the polishing pad.