Abstract: The invention provides a method of wet-etching a laminate of metal films on a base plate in a target predetermined pattern. The metal films include a naturally oxidized Ti film as a top layer. The method includes a resist forming process of forming a resist film having a shape corresponding to the predetermined pattern on the laminate, a top layer selectively etching process of placing the laminate in contact with a top layer selectively etching solution to mainly etch a portion of the top layer that is not covered by the resist film, and a finishing etching process of placing the laminate in contact with a finishing etching solution to etch all layers including the top layer until a target shape of the laminate is obtained.

Abstract: A substrate processing device includes shafts, rollers, a gas blowing unit, bearings, and s suction unit. The shafts include internal spaces and first through holes communicated with the internal spaces. The rollers are attached to the shafts to be rotatable about axes of the shafts for conveying a substrate. The gas blowing unit is configured to blow gas to the substrate carried by the rollers. The bearings support the shafts to be rotatable and include second through holes communicated with the first through holes of the shafts. The bearings include inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings. The suction unit is configured to suck air in the internal spaces of the shafts.

Abstract: A substrate processing device includes shafts, rollers, a gas blowing unit, bearings, and s suction unit. The shafts include internal spaces and first through holes communicated with the internal spaces. The rollers are attached to the shafts to be rotatable about axes of the shafts for conveying a substrate. The gas blowing unit is configured to blow gas to the substrate carried by the rollers. The bearings support the shafts to be rotatable and include second through holes communicated with the first through holes of the shafts. The bearings include inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings. The suction unit is configured to suck air in the internal spaces of the shafts.

Abstract: The present invention includes: a multilayer film forming step of forming a multilayer film constituted by a plurality of metal films layered together; after the multilayer film forming step, a resist forming step of forming a resist film having patterned openings on the multilayer film; after the resist forming step, a dry etching step of dry etching the multilayer film to remove at least one metal film located at the top of the multilayer film and exposed by the openings; after the dry etching step, a wet etching step of wet etching the multilayer film to remove at least the metal films exposed by the openings.