Patents by Inventor Yohichi Namariyama

Yohichi Namariyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming detailed images
    Patent number: 4617254
    Abstract: A process for forming a detailed image having a high sensitivity to far-UV light and capable of giving a positive type image with a high precision is provided, which process comprises applying onto a base a resist solution comprising an organic solution, of a homopolymer of methyl vinyl ketone or a copolymer thereof with a comonomer of the formula R.sup.1 R.sup.2 C.dbd.CH.sub.2 wherein R.sup.1 is H or --CH.sub.3 and R.sup.2 is acetoxy, nitrile, unsubstituted or substituted aryl or ##STR1## wherein R.sup.3 is alkyl, to form a coating on the base; irradiating far-UV light; developing the coating with a developer composed mainly of a cellosolve compound; and rinsing or/and washing the resulting material.
    Type: Grant
    Filed: April 16, 1985
    Date of Patent: October 14, 1986
    Assignee: Chisso Corporation
    Inventors: Akihiro Kinoshita, Yohichi Namariyama, Hiromi Higashi