Patents by Inventor Yohsuke Kawasaki
Yohsuke Kawasaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11092506Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. The cathode includes a first cathode plate including a through hole through which the anode extends, and a storage portion configured to store the electromagnetic wave source, a second cathode plate arranged separately from the first cathode plate, a third cathode plate arranged between the first cathode plate and the second cathode plate to be in contact with the first cathode plate, and a member configured to surround the first cathode plate, the second cathode plate, and the third cathode plate.Type: GrantFiled: January 6, 2021Date of Patent: August 17, 2021Assignee: CANON ANELVA CORPORATIONInventor: Yohsuke Kawasaki
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Publication number: 20210123827Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. The cathode includes a first cathode plate including a through hole through which the anode extends, and a storage portion configured to store the electromagnetic wave source, a second cathode plate arranged separately from the first cathode plate, a third cathode plate arranged between the first cathode plate and the second cathode plate to be in contact with the first cathode plate, and a member configured to surround the first cathode plate, the second cathode plate, and the third cathode plate.Type: ApplicationFiled: January 6, 2021Publication date: April 29, 2021Applicant: CANON ANELVA CORPORATIONInventor: Yohsuke KAWASAKI
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Patent number: 10969291Abstract: An ionization gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes, a storage portion configured to store the electromagnetic wave source, and a passage arranged between the storage portion and the through hole and configured to pass an electromagnetic wave generated by the electromagnetic wave source.Type: GrantFiled: September 14, 2020Date of Patent: April 6, 2021Assignee: CANON ANELVA CORPORATIONInventor: Yohsuke Kawasaki
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Publication number: 20210080336Abstract: An ionization gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes, a storage portion configured to store the electromagnetic wave source, and a passage arranged between the storage portion and the through hole and configured to pass an electromagnetic wave generated by the electromagnetic wave source.Type: ApplicationFiled: September 14, 2020Publication date: March 18, 2021Applicant: CANON ANELVA CORPORATIONInventor: Yohsuke KAWASAKI
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Patent number: 10914649Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. A shape of the through hole on a section along an axial direction of the anode includes a concave portion sandwiched between two convex portions.Type: GrantFiled: October 1, 2020Date of Patent: February 9, 2021Assignee: CANON ANELVA CORPORATIONInventor: Yohsuke Kawasaki
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Patent number: 10222287Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.Type: GrantFiled: October 30, 2017Date of Patent: March 5, 2019Assignee: CANON ANELVA CORPORATIONInventors: Yohsuke Kawasaki, Itaru Enomoto, Isao Mochizuki
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Publication number: 20180259417Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.Type: ApplicationFiled: October 30, 2017Publication date: September 13, 2018Inventors: YOHSUKE KAWASAKI, ITARU ENOMOTO, ISAO MOCHIZUKI
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Patent number: 8384391Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.Type: GrantFiled: May 12, 2011Date of Patent: February 26, 2013Assignee: Canon Anelva CorporationInventors: Yohsuke Kawasaki, Hideo Mano
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Patent number: 8324904Abstract: The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.Type: GrantFiled: May 24, 2010Date of Patent: December 4, 2012Assignee: Canon Anelva CorporationInventor: Yohsuke Kawasaki
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Patent number: 8120366Abstract: To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode 2, a measuring element enclosure (cathode) 1 arranged to surround the anode, and a magnet 3 disposed on the outer periphery of the cathode 1. A discharge trigger supporting electrode 5 having a projection 21 directed toward the center axis of the anode 2 is disposed in a discharge space 9 of the cathode 1. The discharge trigger supporting electrode 5 is removably disposed on the cathode 1, and the distance between the tip of the projection 21 of the discharge trigger supporting electrode 5 and the anode 2 is equal to or more than 0.3 mm.Type: GrantFiled: May 22, 2009Date of Patent: February 21, 2012Assignee: Canon Anelva CorporationInventor: Yohsuke Kawasaki
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Publication number: 20110279127Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.Type: ApplicationFiled: May 12, 2011Publication date: November 17, 2011Applicant: CANON ANELVA CORPORATIONInventors: YOHSUKE KAWASAKI, HIDEO MANO
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Patent number: 7918139Abstract: A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.Type: GrantFiled: February 4, 2010Date of Patent: April 5, 2011Assignee: Canon Anelva CorporationInventor: Yohsuke Kawasaki
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Publication number: 20100301869Abstract: The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential.Type: ApplicationFiled: May 24, 2010Publication date: December 2, 2010Applicant: CANON ANELVA CORPORATIONInventor: Yohsuke Kawasaki
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Publication number: 20100259273Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate.Type: ApplicationFiled: March 16, 2010Publication date: October 14, 2010Applicant: CANON ANELVA CORPORATIONInventors: Yohsuke Kawasaki, Toshio Kikuchi
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Publication number: 20100164502Abstract: To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode 2, a measuring element enclosure (cathode) 1 arranged to surround the anode, and a magnet 3 disposed on the outer periphery of the cathode 1. A discharge trigger supporting electrode 5 having a projection 21 directed toward the center axis of the anode 2 is disposed in a discharge space 9 of the cathode 1. The discharge trigger supporting electrode 5 is removably disposed on the cathode 1, and the distance between the tip of the projection 21 of the discharge trigger supporting electrode 5 and the anode 2 is equal to or more than 0.3 mm.Type: ApplicationFiled: May 22, 2009Publication date: July 1, 2010Applicant: CANON ANELVA TECHNIX CORPORATIONInventor: Yohsuke Kawasaki
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Publication number: 20100132475Abstract: A pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.Type: ApplicationFiled: February 4, 2010Publication date: June 3, 2010Applicant: C/O CANON ANELVA TECHNIX CORPORATIONInventor: Yohsuke Kawasaki
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Patent number: 7694574Abstract: A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.Type: GrantFiled: April 17, 2009Date of Patent: April 13, 2010Assignee: Canon ANELVA Technix CorporationInventor: Yohsuke Kawasaki
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Publication number: 20090199649Abstract: A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.Type: ApplicationFiled: April 17, 2009Publication date: August 13, 2009Applicant: CANON ANELVA TECHNIX CORPORATIONInventor: Yohsuke Kawasaki