Abstract: An electronic device including a communication circuit, at least one processor, and at least one memory configured to store instructions, the at least one memory and instructions configured to, with the at least one processor, cause the electronic device to: receive equipment data of a semiconductor exposure equipment from an external database through the communication circuit, generate integrated data that integrates the equipment data by wafer and equipment model, generate a model that predicts daily wafer production of the semiconductor exposure equipment based on process time of the semiconductor exposure equipment for a wafer using the integrated data, the process time including wafer swap time for each equipment, lot swap time for each equipment, and exposure time for each equipment, and evaluate performance of the semiconductor exposure equipment based on the generated model.

Abstract: An anomaly detection method includes receiving data regarding semiconductor process variables, generating an anomaly detection model through a convolution algorithm and a transformer algorithm, classifying the data by using the generated anomaly detection model, and detecting, based upon the classified data, an anomaly associated with the semiconductor process variables.